
5.TROUBLESHOOTING B-70254EN/01
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ALM No.4090
Laser beam not generated
This alarm is issued, if an attempt is made to radiate a laser beam,
when the laser oscillator is not in the LSTR state (discharging
state).
ALM No.4094
Vacuum pump operation abnormal
This alarm occurs when the thermal switch of the magnetic
contactor for the exhaust pump is tripped.
No. Cause of trouble Solution
1 Clogged exhaust pump
filter
Replace the exhaust pump filter.
2 Clogged exhaust pump
air outlet
Clean the outlet and remove the foreign matters
with which the outlet is clogged.
3 Anomaly of thermal
switch
4 Anomaly of IF PCB
5 Signal cable broken
It is necessary to replace the part.
Call the FANUC service center.
ALM No.4099
Gas pressure not reached
This alarm is issued, if the discharge tube gas pressure does not
reach [specified discharge tube gas pressure during oscillation -
tolerance] after HV is set to ON.
No. Cause of trouble Solution
1 Invalid parameter
setting
Check whether the values of PRM Nos.
15001/bit3, 15247, and 15248 are set as
indicated in the attached data sheets. If a
different value is set, set the value specified in
the data sheets.
2 Gas leakage from
internal piping
3 Pressure sensor
abnormal
It is necessary to locate the leakage and replace
the related part.
Call the FANUC service center.
ALM No.4100
Inverter abnormal
If the inverter used to power the turbo blower is abnormal, this
alarm is issued.
When this alarm is issued, check that the alarm LED on the LED
indicator section of the inverter is lit. At this time, do not turn off
the power to the inverter because the alarm will be reset if the
power is turned off.
For an explanation of faults and corresponding countermeasures,
see the Maintenance Manual (B-70255EN)
No. Cause of trouble Solution
1 Excessive intake
pressure
Check whether the values of PRM Nos. 15240,
15241, and 15242 are set according to the
attached data sheets.