
B-70254EN/01 C.PARAMTER LIST
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C.17 LASER GAS MIXER FUNCTION
15710 Wait time for checking the remaining amount in the gas cylinder
Data type: Word
Unit of data: sec
Range of data: 0 to 32767
Standard setting:
Wait time when the remaining amount in the gas cylinder is checked
15711 Gas mixture wait time
Data type: Word
Unit of data: min
Range of data: 0 to 32767
Standard setting: 60
Time required until gas mixture is complete and the mixed gas can be
supplied after gases are filled in the tank.
15712 Gas mixer evacuation time
Data type: Word
Unit of data: min
Range of data: 0 to 32767
Standard setting: 30
Set the time required for evacuating the mixer. This value is also
used for the time required for evaluation for leakage check.
15713 Helium exhaust time
Data type: Word
Unit of data: msec
Range of data: 0 to 32767
Standard setting:
Time required for exhausting the Helium gas from piping before the
next gas is filled after the helium gas is filled
15714 Nitrogen and CO
2
exhaust time
Data type: Word
Unit of data: msec
Range of data: 0 to 32767
Standard setting:
Time required for exhausting the nitrogen gas or carbon dioxide gas
from the piping before the next gas is filled after that gas is filled