
5.ALARMS B-70264EN/02
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ALM No.4082
TUBE PRES. SENSOR
This alarm appears when the signal of the pressure sensor used
for pressure control detector vanishes.
Alarm output condition
This alarm is issued if the actual gas pressure is detected to be zero or
less twice in a row at 16-msec intervals from the time the oscillator start
switch is turned on until it is turned off.
Related data
DGN.905 Actual gas pressure
ALM No.4085
MIRROR CLEANING
This alarm appears when the laser output power decreases and
takes an abnormally higher calibration coefficient.
This monitoring is executed at the start of the oscillator for the
purpose of checking for decreases in output due to contamination
and degradation of optical components.
Alarm output condition
This alarm is issued when the power compensation coefficient exceeds
the power compensation limit during execution of power compensation.
Power compensation coefficient = (Pc/Pa) × 1024
Pc : Parameter No. 15200 or 15201
Pa : Actual laser output
Related parameters
PRM.15200 Power compensation command output for a half of the
discharge tubes
PRM.15201 Power compensation command output for all discharge
tubes
PRM.15203 Power compensation limit
PRM.15204 Power compensation coefficient
ALM No.4087
SHUTTER OH
This alarm is issued when the temperature of the shutter mirror
exceeds a preset maximum.
Alarm output condition
This alarm is issued if the shutter temperature signal becomes "0" after
LRDY is established in the sequence.
Related parameters
DGN.961#6 *SHT Shutter temperature