
5.TROUBLESHOOTING B-70315EN/02
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No. Cause of trouble Solution
5 Anomaly of exhaust
pump
If the above checks do not reveal any
abnormality, the performance of the exhaust
pump has deteriorated. Check the following
items.
1) Check whether specified oil is provided at
an appropriate level. Supply specified oil
as explained in Chapter 4.
2) Check whether the exhaust filter of the
pump is clogged. Replace the exhaust
filter as explained in Chapter 4.
3) Check whether the exhaust pump outlet is
clogged to disable exhaust operation.
Remove the cause of the clogging.
4) Check whether the exhaust pump turns in
the reverse direction because of a
problem in phase rotation. If the steps
above do not clear the fault, replace the
exhaust pump.
ALM No.4081
GAS PRES. CONTROL
The pressure is monitored 45 seconds after the start of gas
pressure control. This alarm is issued if the pressure falls out of
the prescribed range.
Alarm output condition
This alarm is issued when the actual gas pressure is not within ±20 of
the parameter setting (parameter No. 15241) after 45 seconds have
passed since the start of gas pressure control.
Related parameters
PRM.15241 Gas pressure at the start of discharge
Related data
DGN.905 Actual gas pressure
No. Cause of trouble Solution
1 Anomaly of parameter
setting of gas pressure
control
Check whether the values of PRM Nos.
15000#1, 15244, 15245, 15246 are set as
indicated in the attached parameter table. If a
different value is set, set the value specified
in the data sheets.
2 Gas leakage from piping 1) Check whether any component joints of
the gas circulating system are loose. If a
loose joint is found, tighten the joint firmly.
2) Check whether any components of the
gas circulating system are cracked. If a
cracked component is found, replace that
component.
3) Check that the discharge tubes are free
from any hole or crack and that the
O-rings are not degraded.
If any hole or degrading is found in such a
component, replace it.