
B-70315EN/02 5.TROUBLESHOOTING
- 127 -
Alarm output condition
When the integral value of gas pressure control is preset and the
pressure is increased from the from the gas pressure at the start of
discharge to the gas pressure during oscillation, this alarm is issued if
the actual gas pressure has not increased to the value equal to the
setting of the pressure in the tube during oscillation (parameter No.
15242 or 15243) minus the setting of parameter No.15248 in 15
seconds after the gas pressure target reaches the gas pressure during
oscillation.
Related parameters
PRM.15001#3 Specifies whether to preset the integral value of gas
pressure control.
PRM.15242,15243 Setting of the pressure in the tube during oscillation
PRM 15247 Pressure control integrator element preset value
PRM.15248 Tolerable amount by which the target gas pressure
is not reached
Related data
DGN.905 Pressure in the discharge tube
No. Cause of trouble Solution
1 Invalid parameter
setting
Check whether the values of PRM Nos.
15001/bit 3, 15247, and 15248 are set as
indicated in the attached parameter table. If a
different value is set, set the value specified in
the data sheets.
2 Gas leakage from
internal piping
1) Check whether any component joints of the
gas circulating system are loose. If a loose
joint is found, tighten the joint firmly.
2) Check whether any components of the gas
circulating system have cracked. If a
cracked component is found, replace that
component.
3) Check that the discharge tubes are free
from any hole or crack and that the O-rings
are not degraded.
If any hole or degrading is found in such a
component, replace it.
3 Pressure sensor
abnormal
Replace the pressure sensor.
ALM No.4100
INVERTER 1
If the inverter used to power the turbo blower is abnormal, this
alarm is issued.
When this alarm is issued, check that the alarm LED on the LED
indicator section of the inverter is lit. At this time, do not turn off
the power to the inverter because the alarm will be reset if the
power is turned off.
Alarm output condition
This alarm is issued if the inverter alarm signal becomes "0" after the
start of the oscillator and immediately before the completion of purging.
Related data
DGN.962#0 *IAL1 Inverter alarm