
B-70315EN/02 TABLE OF CONTENTS
c-3
5.3.3 Power Supply Cannot Be Switched On Using CRT/MDI Switch........................133
5.3.4 Laser Output Just after Switch On Is Low ...........................................................133
5.3.5 Display of Fluctuating Laser Output on CRT ......................................................134
5.3.6 Circuit Breaker for Cooling Fan, Solenoid Valve, and Stabilized Power Supply
Trips ....................................................................................................................134
5.3.7 Electromagnetic Contactor of Exhaust Pump Trips Thermally............................134
5.3.8 Main Breaker Trips ..............................................................................................135
5.3.9 Excessive Laser Gas Consumption ......................................................................135
5.3.10 Inverter Alarm Display.........................................................................................136
6 OSCILLATOR CONNECTIONS ..........................................................139
6.1 ELECTRICAL CONNECTIONS ................................................................. 140
6.2 COOLING WATER PIPING ....................................................................... 145
6.3 GAS PIPING.............................................................................................. 150
7 UNITS ..................................................................................................156
7.1 INPUT UNIT............................................................................................... 157
7.2 LASER POWER SUPPLY UNIT ................................................................ 166
7.2.1 Replacement Method............................................................................................166
7.2.1.1 Replacing the power supply unit ..................................................................... 166
7.2.1.2 Replacing a high-speed diode.......................................................................... 167
7.2.1.3 Replacing an FET module PCB....................................................................... 168
7.2.2 Adjustment Method..............................................................................................169
7.2.2.1 Preparation....................................................................................................... 169
7.2.2.2 Base discharge adjustment............................................................................... 169
7.2.2.3 Maximum output adjustment ........................................................................... 172
7.2.2.4 Check .............................................................................................................. 172
7.3 MATCHING BOX ....................................................................................... 174
7.3.1 Replacement Method............................................................................................174
7.4 DISCHARGE TUBE................................................................................... 175
7.4.1 Placement Numbers..............................................................................................175
7.4.2 Replacement Method............................................................................................176
7.5 TRIGGER ELECTRODE ........................................................................... 177
7.5.1 Replacement Method............................................................................................177
7.6 TURBO BLOWER...................................................................................... 178
7.6.1 Replacement Method............................................................................................178
7.6.2 Leakage Check and Discharge Aging ..................................................................180
7.6.3 Adjusting the Oil Level Detection Signal ............................................................180
7.7 INVERTER................................................................................................. 181