
B-70315EN/02 APPENDIX B.SPECIFICATIONS
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B SPECIFICATIONS
Item Contents
Model C1000-E C2000-E C4000-E C5000-E C6000-E
Principle RF discharge excited fast axial gas flow CO
2
laser
Structure
Oscillator and
Vacuum pump
unit separated
Integrated type (oscillator and power supply)
Rated laser output 1,000 W 2,000 W 4,000 W 5,000 W 6,000 W
Maximum laser output 1,000 W 2,000 W 4,000 W 5,000 W 6,000 W
< ±1% < ±2%
Output power stability
For 8-hours operation at rated power level with power feedback control calibration function
Laser wavelength
10.6
µm
Beam mode Low order one
< φ27 mm /
45
° linear
< φ27 mm /
Circular
(short optical path)
< φ24 mm /
45
° linear
< φ24 mm /
90
° linear
Beam diameter at exit /
Polarization
< φ20 mm /
45
° linear
(long optical path)
< φ
20 mm /
90
° linear
< φ
28 mm /
90
° linear
Beam divergence < 2 mrad (full angle)
Pulse frequency 5 to 2,000 Hz
Pulse duty 0 to 100 %
Pre-mixed gas CO
2
:He:N
2
(Volume ratio
5%:40%:balance)
Pre-mixed gas
CO
2
:He:N
2
(Volume ratio
5%:60%:balance)
Pre-mixed gas
CO
2
:He:N
2
(Volume ratio
5%:40%:balance)
Composition
Composition accuracy :
±5% or less for each composition
Input pressure
0.175
±0.025 MPa (0.15 to 0.2 MPa)
Laser
gas
Consumption rate Approx. 10 liters/h Approx. 20 liters/h
Flow rate > 40 liters/min > 75 liters/min > 160 liters/min > 200 liters/min
20 to 30°C
Temperature
±1°C (for power stability of ±1%) ±2°C (for power stability of ±2%)
Input pressure < 0.5 MPa
Cooling
water
Chiller capacity > 11 KW > 22.1 KW > 44.2 KW > 55 KW > 66 KW
Power line
200VAC +10%, -15% 50/60 Hz
±1Hz or 220VAC +10%, -15% 60 Hz±1Hz
or 230VAC +5%, -15% 60 Hz±1Hz
Power concumption 18 KVA 33 KVA 55 KVA 60 KVA 75 KVA
Maximum current 60 A 90 A 175A 210 A 270 A
Door interlock Nothing
Hour meter Indicating the operational time of the vacuum pump
Mass
Approx. 350kg
(Oscillator
section),
Approx. 30kg
(exhaust pump
section)
Approx. 700kg Approx. 900kg
Approx.
1,100kg
Approx.
1,300kg