
D.DIAGNOSIS SCREEN INFORMATION APPENDIX B-70315EN/02
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#7 #6 #5 #4 #3 #2 #1 #0
961 *ABT *SHT SOF SON *RAL *WT1 *CAT *MVW
*MVW Cooling water amount
0 : Abnormal
1 : Normal
*CAT Chamber temperature
0 : Abnormal
1 : Normal
*WT1 Condensation
0 : Abnormal
1 : Normal
*RAL Exhaust pump alarm
0 : Abnormal
1 : Normal
SON Open shutter
The shutter is open when this bit is set to 1.
SOF Closed shutter
The shutter is closed when this bit is set to 1.
*SHT Shutter temperature
0 : Abnormal
1 : Normal
*ABT Absorber temperature
0 : Abnormal
1 : Normal
#7 #6 #5 #4 #3 #2 #1 #0
962 GAS *OH1 *TC1 *M-R *L-V *AR1 *IA1
*IA1 Inverter alarm
0 : Abnormal
1 : Normal
*AR1 Frequency signal
0 : Mismatch
1 : Match
*L-V Turbo blower oil
0 : Oil level too low
1 : Normal
*M-R Beam reflection unit
0 : Mirror not mounted
1 : Normal
*TC1 Turbo current
0 : Abnormal
1 : Normal
*OH1 Turbo winding temperature
0 : Abnormal
1 : Normal
GAS Laser gas type
0: CO
2
:He:N
2
=5:40:55 If the setting of the setting pin
PRG of the IF PCB is "X1"
1: CO
2
:He:N
2
=5:60:35 or 5:70:25 If the setting of the setting pin
PRG of the IF PCB is "X5"