
B-70315EN/02 APPENDIX E.PARAMETER LIST
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E.9 PARAMETERS FOR LASER MAINTENANCE TIMING
INDICATION FUNCTIONS
15150 Laser RUN ON time
[Data type] 2-word
[Unit of data] 0.1 hour
[Valid data range] 0 to 99999999
A cumulative RUN ON time is automatically set.
15151 Exhaust pump operation time
[Data type] 2-word
[Unit of data] 0.1 hour
[Valid data range] 0 to 99999999
A cumulative exhaust pump operation time is automatically set.
15152 Shutter alarm mask time
[Data type] Word
[Unit of data] msec
[Valid data range] 0 to 32767
Set a time from when shutter operation is directed until shutter alarm
monitoring starts.
#7 #6 #5 #4 #3 #2 #1 #0
15153 LCK
[Data type] Bit
LCK
0: Disables the automatic leakage check function.
1: Enables the automatic leakage check function.
15154 Leakage judgment time
[Data type] Word
[Unit of data] sec
[Valid data range] 3 to 65535
Set the time during which the valve is closed and the internal pressure
of a discharge tube is kept for leakage check. The internal pressure of
a discharge tube is measured four times within the specified time. If a
value of 0 to 2 is set, the automatic leakage check function does not
operate.