
B–70114EN/04
3. INSTALLATION
45
(1)Ambient temperature
+5 to 30°C
(2)Temperature drift
Max 1.1°C/min
(3)Humidity
<75% (relative)
(4)Vibration
Acceleration <0.05G
Amplitude <5µm
(5)Atmosphere
Free from dust and volatile vapor
(1)Input power and maximum current
Model Power Maximum current
C1500B 23 KVA 80 A
C2000B, C2000C 33 KVA 110 A
C3000C, C3000D 44 KVA 150 A
C4000A 55 KVA 190 A
C6000B 90 KVA 300 A
(2)Voltage
200VAC+10%, –15%, 50/60Hz"1Hz, 3f
or 220VAC+10%, –15%, 60Hz"1Hz, 3f
(3)Earth–ground
S Ground (<10 ohm)
S Protective earth (PE)
For the laser gas, the following specifications are required.
(1)Composition and its accuracy
CO
2
:5"0.25% Purity >99.99%
He: 40"2.00% >99.99%
N
2
;55"2.75% (Balance) >99.99%
(2)Water vapor (H
2
O) <5ppm
(3)Hydrocarbon (CmHn) <1ppm
3.1
CONDITION
3.1.1
Environmental
Conditions
3.1.2
Power Source
3.1.3
Laser Gas