
B-70314EN/02 TABLE OF CONTENTS
c-3
5.3.1 Maintenance Panels and Oil Gauge Position........................................................103
5.3.2 Turbo Blower Oil .................................................................................................107
5.3.3 Exhaust Pump Oil.................................................................................................109
5.3.4 Exhaust Pump Filter .............................................................................................111
5.4 AGING ....................................................................................................... 112
5.4.1 Leak Check method..............................................................................................112
5.4.2 Aging method.......................................................................................................113
5.5 MAINTENANCE PARTS............................................................................ 114
5.5.1 Spare Parts............................................................................................................114
5.5.2 Maintenance Tools ...............................................................................................115
6 TROUBLESHOOTING ........................................................................116
6.1 TROUBLESHOOTING PROCEDURE....................................................... 117
6.2 RESPONDING TO ALARM MESSAGES ON THE SCREEN.................... 118
APPENDIX
A EXTERNAL VIEW OF LASER OSCILLATOR....................................145
B SPECIFICATIONS...............................................................................149
C ERROR CODE LIST............................................................................150
D FANUC SERVICE NETWORK ............................................................152
E GLOSSARY.........................................................................................153