
B-64663EN/01 LASER FUNCTION 3.LASER SEQUENCE CONTROL
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Signal address
#7 #6 #5 #4 #3 #2 #1 #0
G221 CLRDY
G222 HVON RUN
F221 LSTR RFHV CLON WAIT PURGE LRDY
Parameter
#7 #6 #5 #4 #3 #2 #1 #0
15004 CWY
[Data type] Bit
CWY Specifies the type of laser oscillator to be connected.
0: CO
2
laser
1: CW-YAG laser
#7 #6 #5 #4 #3 #2 #1 #0
15003 GVW
[Data type] Bit
GVW 0: Evacuation is not performed before the oscillator stops. (for
maintenance)
1: Evacuation is performed before the oscillator stops. (Normal use)
The duration for which evacuation is to be performed is set in
parameter No.15256.
15256 RUN-OFF evacuation time
[Data type] Word
[Unit of data] Seconds
[Valid data range] 600 to 32767
[Standard setting value] 900
If bit 2 (GVW) of parameter No.15003 is 1, evacuation is performed
for the set duration when the oscillator start signal (RUN) is set to 0.
Alarm and message
No. Message Contents
4066 DISCHARGING Discharging could not be started normally.
4070 CHILLER NOT READY No ready signal is sent from the external chiller.
4072 CHILL FLOW Cooling water flow is insufficient.
4073 LASER GAS PRES. The laser gas pressure is low.
4075 CHILLER TEMP. Condensation was detected.
4081 GAS PRES. CONTROL The actual gas pressure did not fall within ±2.0 (1 = 133 Pa) of the setting of
parameter No. 15241, within 45 seconds after gas control started.
4099 GAS PRES. NOT
REACH
With bit 3 of parameter No. 15001 being set to 1, the actual gas pressure was
insufficient when the gas pressure at the start of discharging was raised to the gas
pressure at the time of oscillation. The actual gas pressure was not raised to the
value obtained by subtracting the setting of parameter No. 15248 from the setting of
parameter No. 15242 or No.15243 within 15 seconds after the gas pressure goal
reached the gas pressure at the time of oscillation.