
4. DESCRIPTION OF PARAMETERS
B–63200EN/03
26
15150 Laser RUN–ON period
[Data type] Two–word
[Unit of data] 0.1 hour
[Valid data range] 0 to 99999999
The total RUN–ON time is automatically specified.
15151 Vacuum pump operation period
[Data type] Two–word
[Unit of data] 0.1 hour
[Valid data range] 0 to 99999999
The total operation period of the vacuum pump is automatically specified.
15152 Shutter alarm mask time
[Data type] Word
[Unit of data] Millisecond
[Valid data range] 0 to 32767
Specify a time from when the shutter operation is specified until the alarm
monitor starts.
#7
15153
#6 #5 #4 #3 #2 #1 #0
LCK
[Data type] Bit
LCK The leak check function is:
0 : Disabled.
1 : Enabled.
15154 Leak judgment time
[Data type] Word
[Unit of data] sec
[Valid data range] 3 to 65535
Specify the time in which the valve is to be closed and the in–discharge–
tube pressure is to be maintained for a leak check.
In the specified time, the in–discharge–tube pressure is measured a total of
four times. If 0 to 2 is specified, the leak check function is not executed.
4.8
LASER
MAINTENANCE/
INSPECTION TIME
DISPLAY FUNCTION