
B–63200EN/03
4. DESCRIPTION OF PARAMETERS
33
15240 Negative pressure for completing evacuation
[Data type] Word
[Unit of data] (1=13 Pa)
[Valid data range] 0 to 32767
The negative pressure is applied to evacuate the discharge tube during the
laser startup sequence.
15241 In–tube pressure at the start of discharge
[Data type] Word
[Unit of data] (1=13 Pa)
[Valid data range] 0 to 32767
The discharge tube has the gas pressure at the start of discharge.
15242 In–tube pressure during oscillation (50 Hz)
[Data type] Word
[Unit of data] (1=13 Pa)
[Valid data range] 0 to 32767
The discharge tube has the gas pressure during laser oscillation (50 Hz).
15243 In–tube pressure during oscillation (60 Hz)
[Data type] Word
[Unit of data] (1=13 Pa)
[Valid data range] 0 to 32767
The discharge tube has the gas pressure during laser oscillation (60 Hz).
15244 Gas pressure control gain
[Data type] Word
[Unit of data]
[Valid data range] 0 to 32767
The feedback gain is used to maintain a constant gas pressure in the
discharge tube.
4.11
PARAMETERS
RELATED TO GAS
PRESSURE
CONTROL (1)