
4. DESCRIPTION OF PARAMETERS
B–63670EN/01
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15220 Maximum specifiable bias value at the start of discharge
[Data type] Word
[Unit of data] mV
[Valid data range] 0 to 32767
Specify the maximum bias value that can be specified at the start of
discharge.
15221 Discharge start voltage
[Data type] Word
[Unit of data] V
[Valid data range] 0 to 32767
Specify a discharge start voltage.
15222 Discharge start wait time
[Data type] Word
[Unit of data] 10 milliseconds
[Valid data range] 0 to 32767
Specify a wait time from when the bias value is maximized at the start of
discharge until actual discharge is confirmed.
15223 Bias value
[Data type] Word
[Unit of data] mV
[Valid data range] 0 to 32767
Specify a bias value.
15224 Modulation voltage
[Data type] Word
[Unit of data] mV
[Valid data range] 0 to 3000
Value by which the normal bias value is to be reduced during modulation.
15225 Modulation time
[Data type] Word
[Unit of data] 10 msec
[Valid data range] 0 to 32767
Time in which the bias value is to be reduced.
4.10
PARAMETERS
RELATED TO
DISCHARGE