
B–63670EN/01
4. DESCRIPTION OF PARAMETERS
35
15245 In–tube pressure control gain 2
[Data type] Word
[Unit of data]
[Valid data range] 0 to 32767
Specify a gas pressure control gain for reference discharge. This setting is
valid when bit 1 (LGC) of parameter No. 15000 is set to 1.
15246 Pressure control integral gain
[Data type] Word
[Unit of data]
[Valid data range] 0 to 32767
The setting is the feedback gain of an integral element for gas pressure
control.
15247 Pressure control integral element preset value
[Data type] Word
[Unit of data]
[Valid data range] –32768 to 32767
The setting is the preset value of an integral element for gas pressure
control.
15248 Lowest permissible gas pressure
[Data type] Word
[Unit of data] (1=13 Pa)
[Valid data range] 0 to 32767
When the gas pressure is low but reaches this setting, no alarm is raised.
15249 Gas pressure rise time
[Data type] Word
[Unit of data] Second
[Valid data range] 0 to 32767
Specify a gas pressure rise time in sequence 27.
15250 Gas pressure rise time 2
[Data type] Word
[Unit of data] sec
[Valid data range] 0 to 45
Set the time required to change from the negative pressure for completing
evacuation (parameter No. 15240) to the in–tube pressure at the start of
discharge (parameter No. 15241) in sequence 18.