
4. DESCRIPTION OF PARAMETERS
B–63670EN/01
38
15270 Normal discharge tube voltage
[Data type] Word
[Unit of data] V
[Valid data range] 0 to 32767
Specify a discharge tube voltage in normal reference discharge. This
parameter is automatically rewritten after the discharge start signal
(G222#7 HVON) turned “ON”.
15271 Permissible power decrease
[Data type] Word
[Unit of data] W
[Valid data range] 0 to 32767
When the difference between the specified power and actual power is not
smaller than this value, an output decrease alarm is raised.
15272 Permissible decrease in discharge tube voltage
[Data type] Word
[Unit of data] V
[Valid data range] 0 to 32767
When the difference in the discharge tube voltage between the laser being
used and at laser activation is not smaller than this value, an alarm 4088
(voltage decrease) is raised.
15276 Laser gas replacement time
[Data type] Word
[Unit of data] Second
[Valid data range] 0 to 32767
Time after which new gas is to be injected to the internal piping system.
4.13
LASER
POWER/VOLTAGE
DECREASE