
B-70264EN/02 TABLE OF CONTENTS
c-1
TABLE OF CONTENTS
SAFETY PRECAUTIONS...........................................................................s-1
PREFACE ..................................................................................................p-1
1 NOTES ON USE ....................................................................................1
1.1 OPERATING ENVIRONMENT CONDITIONS............................................... 2
1.2 COOLING WATER........................................................................................ 3
1.3 LASER GAS .................................................................................................. 5
1.3.1 Laser gas specification .............................................................................................5
1.3.2 Supply Gas Pressure.................................................................................................5
1.3.3 Replacing the Laser Gas Cylinder............................................................................5
1.4 OSCILLATOR MIRRORS .............................................................................. 6
1.5 POWER CABLE ............................................................................................ 7
1.6 NOTIFICATION IN ACCORDANCE WITH THE RADIO LAW
(APPLICATION FOR PERMISSION OF HIGH-FREQUENCY
EQUIPMENT) ................................................................................................ 9
2 HANDLING THE LASER BEAM ..........................................................10
2.1 WARNING LABELS..................................................................................... 11
2.2 OPTICAL PATHS IN THE OSCILLATOR.................................................... 20
3 INTERNAL STRUCTURE..................................................................... 23
3.1 OUTLINE ..................................................................................................... 24
3.2 INTERNAL STRUCTURE............................................................................ 26
4 MAINTENANCE ...................................................................................35
4.1 DAILY INSPECTION ................................................................................... 36
4.2 PERIODIC MAINTENANCE ........................................................................ 37
4.3 DETAILS OF MAINTENANCE..................................................................... 38
4.3.1 Turbo Blower Oil ...................................................................................................38
4.3.2 Exhaust Pump Oil...................................................................................................40
4.3.3 Exhaust Pump Filter...............................................................................................41
4.3.4 Checking Operation Times.....................................................................................42
4.3.5 Automatic Aging ....................................................................................................44
4.4 MAINTENANCE PARTS LIST ..................................................................... 45
5 ALARMS .............................................................................................. 46
5.1 CHECKING THE ALARM OCCURRENCE STATUS .................................. 47