
5.ALARMS B-70264EN/02
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#7 #6 #5 #4 #3 #2 #1 #0
G223 POV7 POV6 POV5 POV4 POV3 POV2 POV1 POV0
POV7 to POV0 Power override signals
#7 #6 #5 #4 #3 #2 #1 #0
G224 LCKON
LCKON Leak check signal
#7 #6 #5 #4 #3 #2 #1 #0
G228 *FOV7 *FOV6 *FOV5 *FOV4 *FOV3 *FOV2 *FOV1 *FOV0
*FOV7 to *FOV0 Frequency override signal
[CNC→
→→
→PMC status display]
#7 #6 #5 #4 #3 #2 #1 #0
F220 MWRM SHTONL SHTOFL
MWRM Output decrease alarm signal
SHTONL Shutter on state signal
SHTOFL Shutter off state signal
#7 #6 #5 #4 #3 #2 #1 #0
F221 BEAM LSTR RFHV CLON WAIT PURGE LRDY LARM
BEAM Beam on signal
LSTR Oscillation ready signal
RFHV Base in-discharging signal
CLON Chiller start request signal
WAIT Gas pressure in-controlling signal
PURGE Purge completed signal
LRDY Discharge start prepared signal
LARM Laser alarm signal
#7 #6 #5 #4 #3 #2 #1 #0
F222 CW PULSE AG3 AG2 AG1
CW Continuous wave mode state output signal
PULSE Pulse mode state output signal
AG1 to AG3 Assist gas select signals
#7 #6 #5 #4 #3 #2 #1 #0
F224 AVCL LCKMD
AVCL Valve close signal
0 : Normal state
1 : All valve closed state