
B-70264EN/02 5.ALARMS
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5.3 ALARM DETAILS
Alarm numbers, as well as DGN and PRM Nos., are those of the
FS16i-L.
Check the related parameters and the information on the diagnosis
screen.
ALM No.4061
A/D CONVERTER–1
Alarm output condition
This alarm is issued when the A/D converter 1 on the IF PCB does not
return the conversion completion signal in the specified time after the
start of conversion. This A/D converter is designed to read gas pressure
and power data.
Related data
DGN.981 Data when A/D1 conversion becomes abnormal.
ALM No.4062
A/D CONVERTER–2
Alarm output condition
This alarm is issued when the A/D converter 2 on the IF PCB does not
return the conversion completion signal in the specified time after the
start of conversion. This A/D converter is designed to read discharge
tube voltage and current data.
Related data
DGN.982 Data when A/D2 conversion becomes abnormal.
ALM No.4063
RF POWER SUPPLY / LASER GAS
This message appears when the laser power supply unit becomes
abnormal or performs protective operation. The power supply
unit performs protective operation even if an error occurs in
other than the power supply unit itself. This alarm will recur
after replacement of the power supply alone without eliminating
the root cause.
Alarm output condition
This alarm is issued if, after the LRDY state is established in the
sequence, an alarm signal is sent from the power supply unit, and any of
the power supply operation status signal becomes "0". Note that a power
supply that is not set with parameter No. 15025 or 15027 is not checked.
Related parameters
PRM.15025,15027 Power supply selection
Related data
DGN.966 Power supply unit operation status
DGN.970 Power supply unit selection signal
DGN.974 Power supply unit alarm display