
4.MAINTENANCE B-70264EN/02
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4.3.5 Automatic Aging
If you open the laser gas circulating system to the atmosphere after
replacing the turbo oil, for example, you can perform discharge aging
by using the automatic aging function. The operating method is
described below.
(1) Display the parameter screen and check that bit 6 of parameter
No. 15008 (EGE) is set to "1".
#7 #6 #5 #4 #3 #2 #1 #0
15008 EGE
EGE Automatic aging function is:
1 : Enabled.
0 : Disabled.
(2) If the parameter has been set, turn on the oscillator start switch
(RUN), and when the discharge ready state (LRDY) is
established, set parameter No. 15334 (number of times aging is
to be performed) to "2" referring to "Setting Parameters" in
Chapter 6.
(3) Set the parameter and then turn on the discharge start switch
(HVON), and aging is executed the specified number of times.
After the end, the oscillation ready state is established.
(4) If bit 6 of parameter No. 15008 (EGE) is not set to "1", set it to
"1" referring to "Setting Parameters" in Chapter 6. Check the
settings of parameters Nos. 15326 to 15331 and Nos. 15320 to
15325 and then follow steps (2) and (3).
Model
PRM
No.
Description
C1000-E C2000-E C4000-E C5000-E C6000-E
15326 Power command when aging is performed with the
automatic aging
700 1000 2500 3500 4000
15327 Oscillation frequency command for aging 100 100 100 100 100
15328 Pulse duty cycle command for aging 50 50 50 30 30
15329 Time required to perform aging once 900 900 900 900 900
15330 Gas pressure setting (50 Hz) for aging 500 560 630 740 520
15331 Gas pressure setting (60 Hz) for aging 500 560 630 740 520
15320 Command power for power compensation 1000 2000 4000 5000 6000
15321 Oscillation frequency command for power
compensation
100 100 100 100 100
15322 Pulse duty cycle command for power
compensation
100 100 100 100 100
15323 Command time for power compensation 180 180 300 300 300
15324 Gas pressure setting for power compensation
(50Hz)
600 660 730 840 620
15325 Gas pressure setting for power compensation
(60Hz)
600 660 730 840 620