
5.ALARMS B-70264EN/02
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ALM No.4094
VANE PUMP
This alarm occurs when the thermal switch of the magnetic
contactor for the exhaust pump is tripped.
Alarm output condition
This alarm is issued if the exhaust pump alarm RPAL becomes "0" after
the start of the oscillator and immediately before the completion of
purging.
Related data
DGN.972 RPA Exhaust pump start
DGN.961#3 *RPAL Exhaust pump alarm
ALM No.4099
GAS PRES. NOT REACH
After the discharge start signal (HV ON) is turned on, the gas
pressure in the discharge tube is compared with the setting of the
pressure in the tube during oscillation. This alarm is issued if the
pressure does not reach the tolerable amount by which the target
pressure is not reached.
Alarm output condition
When the integral value of gas pressure control is preset and the
pressure is increased from the from the gas pressure at the start of
discharge to the gas pressure during oscillation, this alarm is issued if
the actual gas pressure has not increased to the value equal to the
setting of the pressure in the tube during oscillation (parameter No.
15242 or 15243) minus the setting of parameter No.15248 in 15
seconds after the gas pressure target reaches the gas pressure during
oscillation.
Related parameters
PRM.15001#3 Specifies whether to preset the integral value of gas
pressure control.
PRM.15242,15243 Setting of the pressure in the tube during oscillation
PRM 15247 Pressure control integrator element preset value
PRM.15248 Tolerable amount by which the target gas pressure
is not reached
Related data
DGN.905 Pressure in the discharge tube
ALM No.4100
INVERTER 1
If the inverter used to power the turbo blower is abnormal, this
alarm is issued.
When this alarm is issued, check that the alarm LED on the LED
indicator section of the inverter is lit. At this time, do not turn off
the power to the inverter because the alarm will be reset if the
power is turned off.
Alarm output condition
This alarm is issued if the inverter alarm signal becomes "0" after the
start of the oscillator and immediately before the completion of purging.
Related data
DGN.962#0 *IAL1 Inverter alarm