
4.MAINTENANCE B-70264EN/02
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4.1 DAILY INSPECTION
Table 4.1 lists daily inspection items. Inspect the laser oscillator
according to this table. When parts (including oil) have been used for
a prescribed period, replace them quickly.
Table 4.1 Daily inspection items
Item Period Content and instruction
1 Residual laser gas Daily
Check the primary pressure as measured at the regulator on the laser gas
cylinder. If the primary pressure is 1MPa or lower, replace the gas
cylinder.
2 Exhaust pump oil Weekly
Make sure that the oil level is between L (lower limit) and H (higher limit). If
the level is L or below, replenish the oil by following the procedure
described in Subsection 4.3.2.
3 Exhaust pump oil leak Weekly
Make sure that no oil is leaking from the exhaust pump main body, drain
valve and their periphery. If oil is leaking, immediately replace the exhaust
pump filter, because it is likely to have been clogged.
4 Turbo blower oil Daily
Make sure that the oil level is between L (lower limit) and H (higher limit). If
the level is L or below, replenish the oil by following the procedure
described in Subsection 4.3.1.
5 Laser output Weekly
If the laser output decreases within the oscillator, warning message No.
4085 is issued. If this message appears, clean or replace the mirror in the
oscillator quickly.
Daily
Check the discharge pressure of the chiller. If it is high, clean the water
path.
Wait for the water temperature to reach 20°C or greater before starting the
oscillator.
6 Cooling water
Weekly
Check the amount of cooling water in the chiller and check for
contamination.
If the amount of water is small, replenish the water. If the water is
contaminated, clean the water path and replace the water as appropriate.