
B-70264EN/02 5.ALARMS
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ALM No.4079
PUSH RESET KEY
If the emergency stop button is pressed after the discharge start
ready condition (LRDY) is set up, the shutter is closed,
discharge stops, and the LRDY condition is resumed, then this
alarm is issued. To reset the alarm, remove the cause of trouble,
release the emergency stop button, and press the reset key on the
operator's panel.
Alarm output condition
This alarm is issued if an emergency stop occurs after LRDY is
established in the sequence.
Related data
DGN.960#1 *ESAL Emergency stop processing signal
ALM No.4080
LASER TUBE EXHAUST
When the oscillator start switch is turned on, the exhaust pump
starts evacuating the gas in the circulating system to place the
oscillator in the low-pressure state. At this time, this alarm is
issued if the pressure does not reach the prescribed vacuum
pressure when the specified time (default: 10 minutes) has
elapsed after the start of exhaust.
Alarm output condition
Turning the oscillator start switch on causes exhaust to start. This alarm
is issued if the laser gas pressure does not reach the setting of
parameter No. 15240 when the time set in parameter No.15259 has
elapsed.
Related parameters
PRM.15240 Evacuation completion negative pressure
PRM.15259 RUN-ON exhaust time
Related data
DGN.905 Actual gas pressure
ALM No.4081
GAS PRES. CONTROL
The pressure is monitored 45 seconds after the start of gas
pressure control. This alarm is issued if the pressure falls out of
the prescribed range.
Alarm output condition
This alarm is issued when the actual gas pressure is not within ±20 of
the parameter setting (parameter No. 15241) after 45 seconds have
passed since the start of gas pressure control.
Related parameters
PRM.15241 Gas pressure at the start of discharge
Related data
DGN.905 Actual gas pressure