
B-70264EN/02 5.ALARMS
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ALM No.4073
LASER GAS PRES.
The pressure of the laser gas supplied to the laser oscillator is
monitored.
This alarm is issued, if this pressure becomes lower than the
permissible level.
Alarm output condition
1) This alarm is issued if the laser gas supply pressure sensor signal
MGP becomes "0" from the time the oscillator start switch is turned
on until it is turned off.
The alarm monitor is masked while the purge valve is open and for
five seconds after the valve is closed, and while the exhaust valve of
the external piping is open and for five seconds after the valve is
closed.
2) This alarm is issued when purge operation is not completed in three
minutes after the start of purge operation.
3) When a laser gas mixing device is provided, this alarm is issued if
the tank supply pressure signal TEM becomes 0.
Related parameters
PRM.15009 #7 TEM Tank supply pressure (automatically rewritten with
the state signal from the mixer)
Related data
DGN.960 #5 *MGP Laser gas supply pressure sensor
DGN.972 #0 PUG Purge valve
ALM No.4074
ROOTS BLOWER TEMP.
For oscillators with a turbo blower attached, this alarm is not
issued.
Related parameters
PRM.15003 #5 TON Whether a turbo blower is attached (must be set to
"1")
ALM No.4075
CHILL TEMP.
A condensation sensor is mounted to the output mirror holder in
the oscillator. This alarm occurs when the sensor detects
condensation. After this alarm occurs, the alarm status cannot be
reset until the condensation status is released.
Alarm output condition
This alarm is issued if the condensation signal becomes "0" from the
time the oscillator start switch is turned on until it is turned off.
Related data
DGN.961#2 *WT1 Condensation