
7. PARAMETERS
379
05771 Compensation corresponding compensation
point number a of moving axis 2
[Detection unit]
05772 Compensation corresponding compensation
point number b of moving axis 2
[Detection unit]
05773 Compensation corresponding compensation
point number c of moving axis 2
[Detection unit]
05774 Compensation corresponding compensation
point number d of moving axis 2
[Detection unit]
05781 Compensation corresponding compensation
point number a of moving axis 3
[Detection unit]
05782 Compensation corresponding compensation
point number b of moving axis 3
[Detection unit]
05783 Compensation corresponding compensation
point number c of moving axis 3
[Detection unit]
05784 Compensation corresponding compensation
point number d of moving axis 3
[Detection unit]
37) For inclination compensation
05861
Compensation point number a <Axis>
05862 Compensation point number b
Note) To
be set to
05863 Compensation point number c
satisfy
a<b<c<d
05864 Compensation point number d
05871 Compensation α at compensation point number
a for each axis [Detection unit]
<Axis>
05872 Compensation β at compensation point number
b for each axis [Detection unit]
05873 Compensation ϒ at compensation point number
c for each axis [Detection unit]
05874 Compensation ε at compensation point number
d for each axis [Detection unit]