1. Fanuc
  2. LASER C SERIES

LASER C SERIES Maintenance manual Page 341

Maintenance manual
B–70115EN/03
11. LASER OPTICAL SYSTEM
339
(8) Move the lens cleaning paper horizontally to and fro across the
mirror.
NOTE
Since the lens cleaner has a high surface tension, it may be
difficult to move the cleaning paper. As the paper is slowly
moved to and fro across the mirror, however, the ethyl
alcohol will gradually evaporate.
(9) Blow clean air (using, for example, a camera blower) across the
mirror surface to completely evaporate the ethyl alcohol or lens
cleaner.
(10)Repeat steps (7) to (9) until all dirt on the mirror surface has been
removed. Finally, clean the mirror surface with ethyl alcohol.
(11) Check the transmitting side of the mirror. If its surface is dirty,
perform steps (6) to (9) for the transmitting side also. Note that if an
excessive amount of ethyl alcohol or lens cleaner is applied, it may
flow around the back of the mirror, leading to contamination.
(12)Wipe the mirror holder and O–ring with ethyl alcohol.
(13)Reinstall the output coupler in the mirror holder, then insert the
O–ring. When installing the output mirror, pay particular attention
to the mirror orientation. The reflecting plane (the plane indicated
by the arrow on the side of the mirror) must face the discharge tubes.
The arrow is both scribed and marked with ink such that, even if the
ink is entirely removed, it will still be possible to find the scribed
arrow. Align the arrow on the side of the output mirror with the
mirror holder position.
(14)Mount the mirror by reversing steps (2) to (4). Install the mirror
holder in the alignment unit so that the mark on the mirror holder
faces down.
Tighten the mirror holder screw manually, then further tighten the
screw through approximately 30 degrees using a jig. If an
appropriate jig is not available, use the key for the cabinet of the
oscillator instead.
(15) Close the main circuit breaker or turn on the power supply of the laser
oscillator, then turn on the power to the CNC.
(16)Perform a leak check. If the Setting value of the DGN905 (FS16–L,
16i–L) or DGN860 (0–L) is 100 or less, tighten the mirror holder
screw again. In this case, loosen the mirror holder screw first, tighten
the screw manually, then tighten the screw through approximately 30
degrees, using the jig.
(17)This completes cleaning and replacement.
(18)Perform discharge aging.
(19)Then, perform alignment.
NOTE
Never attempt to adjust any part other than the output
coupler.
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Contents Summary of LASER C SERIES Maintenance manual

  • Page 1GE Fanuc Automation Europe Computer Numerical Controls Laser C Series Maintenance Manual B-70115EN/03 TECHNOLOGY AND MORE
  • Page 2
  • Page 3B–70115EN/03 Table of Contents 1. OVERVIEW . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 1.1 ORGANIZATION OF THE MANUAL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
  • Page 4TABLE OF CONTENTS B–70115EN/03 5. MAINTENANCE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 110 5.1 DAILY INSPECTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
  • Page 5B–70115EN/03 TABLE OF CONTENTS 9. SETTING AND ADJUSTMENT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 232 9.1 LASER POWER SUPPLY UNIT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 233 9.1.1 Checkin
  • Page 6TABLE OF CONTENTS B–70115EN/03 10.11.1 Replacing a Fan Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 300 10.11.2 Replacing a Fan–assisted Radiator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
  • Page 7B–70115EN/03 TABLE OF CONTENTS D.3 PARAMETERS FOR CONTOURING CONDITIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 393 D.4 PARAMETERS FOR EDGE MACHINING CONDITIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 394 D.5 PARAMETERS FOR PIERCING CONDITIONS . . .
  • Page 81. OVERVIEW B–70115EN/03 1 OVERVIEW This manual describes the maintenance of the FANUC LASER C series, as well as the structure, configuration, and operation of the laser oscillator. This manual is aimed at those personnel responsible for laser oscillator maintenance. 6
  • Page 9B–70115EN/03 1. OVERVIEW 1.1 This manual is organized as described below. ORGANIZATION OF 1. Overview This chapter describes the organization of this manual, applicable THE MANUAL models, related manuals, and notes on reading this manual. 2. Safety This chapter describes the handling of lasers, and
  • Page 101. OVERVIEW B–70115EN/03 1.2 This manual covers the following models : APPLICABLE Models Abbreviation MODELS FANUC LASER–MODEL C1500B C1500B FANUC LASER–MODEL C2000B C2000B FANUC LASER–MODEL C2000C C2000C FANUC LASER–MODEL C3000C C3000C FANUC LASER–MODEL C3000D C3000D FANUC LASER–MODEL C4000A C4000A
  • Page 11B–70115EN/03 1. OVERVIEW 1.3 The following manuals are available for the FANUC LASER C series : RELATED MANUALS FANUC Series 0–L DESCRIPTIONS B–61572E CONNECTION MANUAL B–61573E OPERATOR’S MANUAL B–61574E MAINTENANCE MANUAL B–61575E FANUC Series 16–LA DESCRIPTIONS B–61852E CONNECTION MANUAL B–61853E
  • Page 121. OVERVIEW B–70115EN/03 1.4 In this manual, the words Warning and Caution, corresponding to different levels of safety requirements, are provided to ensure the user’s TO USE THE LASER safety and protect against damage to the laser oscillator. OSCILLATOR Moreover, sections entitled Note are used to
  • Page 13B–70115EN/03 2. SAFETY 2 SAFETY C1500B, C2000C (C2000B), C3000D (C3000C), C4000A, C6000B produce the rated output laser power of 1500W, 2000W, 3000W, 4000W, 6000W. The CO2 laser beam is the wavelength of 10.6 mm, far infrared, and is invisible to human eyes. The adequate care must be taken when CO2
  • Page 142. SAFETY B–70115EN/03 2.1 1) Potential hazards Laser oscillator emits CO2 laser beam(10.6 mm), which is high power LASER BEAM and invisible. D Being directly exposed to the CO2 laser beam could severely burn you. D The CO2 laser beam could be scattered by your workpiece and burn your eyes or skin.
  • Page 15B–70115EN/03 2. SAFETY Fig. 2.1 (c) is the position of panel that laser beam exposure is occurred without panel in C6000B, when you maintain the oscillator. Fig. 2.1 (d) is the beam path in the cabinet of C1500B, C2000B, C2000C. Fig. 2.1 (e) is the beam path in the cabinet of C3000C, C3000D. Fig. 2.
  • Page 162. SAFETY B–70115EN/03 Fig. 2.1 (c) The position of panel that laser beam exposure is occurred without panel in C6000B. Fig. 2.1 (d) The beam path in the cabinet of C1500B, C2000B, C2000C. 14
  • Page 17B–70115EN/03 2. SAFETY Fig. 2.1 (e) The beam path in the cabinet of C3000C, C3000D. Fig. 2.1 (f) The beam path in the cabinet of C4000A. 15
  • Page 182. SAFETY B–70115EN/03 Fig. 2.1 (g) The beam path in the cabinet of C6000B. 16
  • Page 19B–70115EN/03 2. SAFETY 2.2 1) Potential hazards There is RF voltage of 3 to 4kVo–p in the cabinet of the laser oscillator. HIGH VOLTAGE There is 200 VAC power in the relay panel, be careful not to touch the high voltage. 2) Safety recommendations When it checks the oscillator and exchange the unit,
  • Page 202. SAFETY B–70115EN/03 Front side Back side Fig. 2.2. (a) The position of high voltage in C1500B (Front side, Back side) 18
  • Page 21B–70115EN/03 2. SAFETY Front side Back side Fig. 2.2. (b) The position of high voltage in C2000B (Front side, Back side) 19
  • Page 222. SAFETY B–70115EN/03 Front side Back side Fig. 2.2.(c) The position of high voltage in C2000C (Front side, Back side) 20
  • Page 23B–70115EN/03 2. SAFETY Front side Back side Auxiliary unit Fig. 2.2.(d) The position of high voltage in C3000C(Front , Back , AUX ) 21
  • Page 242. SAFETY B–70115EN/03 Front side Back side Fig. 2.2.(e) The position of high voltage in C3000D(Front side, Back side) 22
  • Page 25B–70115EN/03 2. SAFETY Front side Back side Fig. 2.2.(f) The position of high voltage in C4000A (Front side, Back side) 23
  • Page 262. SAFETY B–70115EN/03 Front side Back side Fig. 2.2.(g) The position of high voltage in C6000B (Front side, Back side) 24
  • Page 27B–70115EN/03 2. SAFETY 2.3 1) Potential hazards CO2 laser beam is delivery from oscillator. Direct or scattered beam SAFETY is exposed. ENCLOSURE (AT 2) Safety recommendations YOUR WORK Mount the safety enclosure made of acrylic resin which can absorb the STATION) laser beam around the working envir
  • Page 282. SAFETY B–70115EN/03 2.6 1) Potential hazards When you touch a part of high temperature, your skin burn. HIGH TEMPERATURE 2) Safety recommendations The pipes of the gas circular system are very a high temperature. Do not touch pipes, heat exchanger and turbo blower because it does not do the burn.
  • Page 29B–70115EN/03 2. SAFETY Front side Back side Fig. 2.6 (a) The position of high temperature in C1500B (Front side, Back side) 27
  • Page 302. SAFETY B–70115EN/03 Front side Back side Fig. 2.6 (b) The position of high temperature in C2000B (Front side, Back side) 28
  • Page 31B–70115EN/03 2. SAFETY Front side Back side Fig. 2.6 (c) The position of high temperature in C2000C (Front side, Back side) 29
  • Page 322. SAFETY B–70115EN/03 Front side Back side Auxiliary unit Fig. 2.6 (d) The position of high temperature in C3000C (Front , Back, Aux) 30
  • Page 33B–70115EN/03 2. SAFETY Front side Back side Fig. 2.6 (e) The position of high temperature in C3000D (Front side, Back side) 31
  • Page 342. SAFETY B–70115EN/03 Front side Back side Fig. 2.6 (f) The position of high temperature in C4000A (Front side, Back side) 32
  • Page 35B–70115EN/03 2. SAFETY Front side Back side Fig. 2.6 (g) The position of high temperature in C6000B (Front side, Back side) 33
  • Page 362. SAFETY B–70115EN/03 2.7 Fig. 2.7 (a)–(g) show the location of the warning labels indicating the high voltage and laser beam path. WARNING LABELS Fig. 2.7 (a) is the location of the warning sticker at front side. (C1500B, C2000B, C2000C, C3000C, C3000D) Fig. 2.7 (b) is the location of the warning
  • Page 37B–70115EN/03 2. SAFETY Fig. 2.7 (b) The location of warning sticker at back side (C1500B, C2000B, C2000C, C3000C, C3000D) Fig. 2.7 (c) The location of the warning sticker (Auxiliary unit of C3000C) 35
  • Page 382. SAFETY B–70115EN/03 Fig. 2.7 (d) The location of warning sticker at front side. (C4000A) Fig. 2.7 (e) The location of warning sticker at back side. (C4000A) 36
  • Page 39B–70115EN/03 2. SAFETY Fig. 2.7 (f) The location of warning sticker at front side. (C6000B) Fig. 2.7 (g) The location of the warning sticker at back side. (C6000B) 37
  • Page 402. SAFETY B–70115EN/03 D Detail of warning sticker 1) Warning logotype (C1500B) 7000W 38
  • Page 41B–70115EN/03 2. SAFETY 2) Warning logotype 3) Label for defeasible non–interlocked protective housing 4) Label for defeasible non–interlocked protective housing 39
  • Page 422. SAFETY B–70115EN/03 5) Caution label for lifting 6) Aperture label 7) Label of non–interlocked protective panel 40
  • Page 43B–70115EN/03 2. SAFETY 8) Identification label 9) Address label 10) High voltage warning label 41
  • Page 442. SAFETY B–70115EN/03 11) Supply voltage label 12) Label of over–current protective 42
  • Page 45B–70115EN/03 2. SAFETY 13) Label of motor and transformer (C1500B,C2000B,C2000C) 13) Label of motor and transformer (C3000C) 43
  • Page 462. SAFETY B–70115EN/03 13) Label of motor and transformer (C3000D) 13) Label of motor and transformer (C4000A) 44
  • Page 47B–70115EN/03 2. SAFETY 13) Label of motor and transformer (C6000B) 14) Label of warning light 15) Maintenance label 45
  • Page 482. SAFETY B–70115EN/03 16) Certification label 17) Short–circuit interrupting capacity of main breaker 18) Caution label for lifting 46
  • Page 49B–70115EN/03 2. SAFETY 2.8 All the laser products have to comply with the various kinds of laser safety regulations, which include the use of key control. For instance, FDA KEY CONTROL PART 1040 PERFORMANCE STANDARDS FOR LIGHT–EMITTING PRODUCTS, Sec 1040. 10 (f), (4) states: “Each laser system class
  • Page 502. SAFETY B–70115EN/03 2.10 Press the emergency stop button when it is dangerous and breaks down. The oscillator is stopped discharging, gas pressure control and stand by EMERGENCY STOP purge state. BUTTON Use the one with the compulsion dissociation mechanism for the relay used for the emergency st
  • Page 51B–70115EN/03 3. INTERNAL STRUCTURE 3 INTERNAL STRUCTURE 49
  • Page 523. INTERNAL STRUCTURE B–70115EN/03 3.1 Fig. 3.1 (a) to (g) show the block diagram of the laser oscillator. The FANUC LASER C series consists of a laser resonator, laser excitation GENERAL power supply, forced gas circulating system, pressure controller, exhaust controller, CNC interface, and a prote
  • Page 53B–70115EN/03 3. INTERNAL STRUCTURE Fig. 3.1 (a) Block diagram (C1500B) 51
  • Page 543. INTERNAL STRUCTURE B–70115EN/03 Fig. 3.1 (b) Block diagram (C2000B) 52
  • Page 55B–70115EN/03 INPUT UNIT STABILIZED PSU LASER LASER PSU UNIT PSU UNIT SIGNAL CABLE MATCHING MATCHING BEAM (TO CNC) BOX BOX DEW FOLDING SENSOR UNIT GUIDE FOLDING LASER MIRROR OUTPUT COUPLER DISCHARGE DISCHARGE TUBE TUBE SHUTTER 53 UNIT DISCHARGE DISCHARGE POWER TUBE TUBE FOLDING REAR SENSOR MIRROR MIR
  • Page 563. INTERNAL STRUCTURE B–70115EN/03 Fig. 3.1 (d) Block diagram (C3000C) 54
  • Page 57B–70115EN/03 INPUT UNIT STABILIZED PSU LASER LASER LASER PSU UNIT PSU UNIT PSU UNIT SIGNAL CABLE MATCHING MATCHING MATCHING MATCHING DEW BEAM (TO CNC) BOX BOX BOX BOX SENSOR FOLDING UNIT GUIDE FOLDING LASER OUTPUT MIRROR COUPLER DISCHARGE DISCHARGE TUBE FOLDING TUBE MIRROR SHUTTER 55 UNIT FOLDING DI
  • Page 58INPUT UNIT LASER LASER LASER LASER STABILIZED PSU UNIT PSU UNIT PSU UNIT PSU UNIT SIGNAL PSU DEW BEAM CABLE MATCHING MATCHING MATCHING MATCHING SENSOR FOLDING BOX BOX BOX BOX 3. INTERNAL STRUCTURE (TO CNC) UNIT GUIDE LASER OUTPUT COUPLER FOLDING MIRROR FOLDING SHUTTER MIRROR UNIT FOLDING MIRROR FOLD
  • Page 59B–70115EN/03 INPUT UNIT STABILIZED SIGNAL PSU CABLE (TO CNC) GUIDE FOLDING LASER MIRROR 57 FOLDING MIRROR POWER SENSOR FROM INLET INLET INLET INLET TO PARTS PARTS TURBO Fig. 3.1 (g) Block diagram (C6000B) H/E H/E PCB H/E H/E 3. INTERNAL STRUCTURE
  • Page 603. INTERNAL STRUCTURE B–70115EN/03 3.2 The following describes the details of each component of the FANUC LASER C series. Fig. 3.2 (a) to (p) show the internal structure. COMPONENT DETAILS (1) Resonator The resonator consists of an output mirror, rear mirror, folding mirrors, discharge tubes, power
  • Page 61B–70115EN/03 3. INTERNAL STRUCTURE (11) Pressure control unit This unit constantly monitors the gas pressure in the discharge tubes and supplies fresh laser gas to the gas circulating system, thus maintaining a constant pressure in the discharge tubes. This unit also monitors the laser gas supply st
  • Page 623. INTERNAL STRUCTURE B–70115EN/03 (19) Water distribution unit This unit distributes cooling water, supplied from either a chiller unit or a temperature–regulated external water supply, to each unit in the laser oscillator. For safety, the water distribution unit is equipped with a flow sensor whic
  • Page 63B–70115EN/03 3. INTERNAL STRUCTURE (29) Control PCB This PCB sends the contractor open/close signal to the power magnetics cabinet, as directed by commands received from the CNC. It also notifies the CNC of the open/close status of the circuit breaker in the power magnetics cabinet. (30) Dew sensor
  • Page 643. INTERNAL STRUCTURE B–70115EN/03 Fig. 3.2 (a) C1500B internal structure (Front, Maintenance side) Fig. 3.2 (b) C1500B internal structure (Back side) 62
  • Page 65B–70115EN/03 3. INTERNAL STRUCTURE Fig. 3.2 (c) C2000B internal structure (Front, Maintenance side) Fig. 3.2 (d) C2000B internal structure (Back side) 63
  • Page 663. INTERNAL STRUCTURE B–70115EN/03 Fig. 3.2 (e) C2000C internal structure (Front side) Fig. 3.2 (f) C2000C internal structure (Back side) 64
  • Page 67B–70115EN/03 3. INTERNAL STRUCTURE Fig. 3.2 (g) C3000C internal structure (Front side) Fig. 3.2 (h) C3000C internal structure (Back side) 65
  • Page 683. INTERNAL STRUCTURE B–70115EN/03 Fig. 3.2 (i) C3000C internal structure (Auxiliary machine section) 66
  • Page 69B–70115EN/03 3. INTERNAL STRUCTURE Fig. 3.2 (j) C3000D internal structure (Front side) Fig. 3.2 (k) C3000D internal structure (Back side) 67
  • Page 703. INTERNAL STRUCTURE B–70115EN/03 Fig. 3.2 (l) C4000A internal structure (Front side) Fig. 3.2 (m) C4000A internal structure (Back side) 68
  • Page 71B–70115EN/03 3. INTERNAL STRUCTURE Fig. 3.2 (n) C6000B internal structure (Front side) Fig. 3.2 (o) C6000B internal structure (Back side) 69
  • Page 723. INTERNAL STRUCTURE B–70115EN/03 Fig. 3.2 (p) Discharge tube and trigger electrode 70
  • Page 73B–70115EN/03 4. INSTALLATION 4 INSTALLATION 71
  • Page 744. INSTALLATION B–70115EN/03 4.1 Use the following procedure to make adjustments and checks during installation. INSTALLATION (1) Check the environment at the installation location. PROCEDURE D Environmental conditions 1) Ambient temperature : +5°C to +30°C 2) Temperature variation : 1.1°C/minute ma
  • Page 75B–70115EN/03 4. INSTALLATION Fig. 4.1 (a) Clamp layout (C1500B, C2000B, C2000C, C3000C, C3000D) 73
  • Page 764. INSTALLATION B–70115EN/03 Fig. 4.1 (b) Clamp layout (C4000A) 74
  • Page 77B–70115EN/03 4. INSTALLATION Fig. 4.1 (c) Clamp layout (C6000B) 75
  • Page 784. INSTALLATION B–70115EN/03 Fig. 4.1 (d) Clamp layout (C6000B) 76
  • Page 79B–70115EN/03 4. INSTALLATION (3) Check the units installed in the main unit cabinet. D Check items 1) Check whether any printed circuit boards are loose or removed. 2) Check whether any cables are damaged (such as damaged sheathing). 3) Check whether any connectors are loose or detached. 4) Check th
  • Page 804. INSTALLATION B–70115EN/03 3) Laser gas composition and purity (See Section 4.4.4.2.) 4) Quality of cooling water (See Section 4.4.4.1.) 5) Flow of cooling water (IN, OUT) (9) Check the input power supply voltage, frequency and phase sequence. D Check items 1) 200/220 VAC +10%, –15%, 50/60 Hz "1 H
  • Page 81B–70115EN/03 4. INSTALLATION 4) Provided no water leakage is observed in step 3) above, allow cooling water to flow through the oscillator at the specified flow rate. Set the output pressure of the cooling water circulating unit to 0.5 MPa. Then, check that there is no water leakage at the following
  • Page 824. INSTALLATION B–70115EN/03 2) If the laser gas flow rate is abnormal, perform adjustment as described in Section 9.5. 3) Reset the values of the bits of parameter No. 15025 [201] through parameter No. 15028 [203] to their original values. This completes the check. (15) Perform laser oscillation to
  • Page 83B–70115EN/03 4. INSTALLATION 4.2 Prior to shipment and transportation, the packing and checking operations described below must be performed. PREPARATION PRIOR TO SHIPMENT (1) Disconnect all NC connecting cables. (2) Disconnect the power cable and ground cable of the input unit in the main unit cabi
  • Page 844. INSTALLATION B–70115EN/03 4.2.2 Remove cooling water according to the procedure below. Removing Cooling (1) Open the cooling water inlet (IN) and outlet (OUT), and leave both Water open. Cooling water will stop draining from the unit after about 10 minutes. (2) Once the cooling water has stopped
  • Page 85B–70115EN/03 4. INSTALLATION Fig 4.2.2 Detail of Distributor (C4000A) (5) Next, connect the compressed air hose to the cooling water outlet (OUT). At this time, ensure that cooling water inlet is open. Remove water in the same procedure as (2), (3), and (4). (6) Once all cooling water has been remov
  • Page 864. INSTALLATION B–70115EN/03 4.3 (1) Oscillation characteristics DETAILS OF 1) Check that bit 4 of parameter No. 15000 (16–L or 16i–L) or bit 4 of parameter No. 200 (0–L) is set to 1. CHECKING 2) Start the oscillator. When a discharge start switch is provided, do not set the switch to ON until after
  • Page 87B–70115EN/03 4. INSTALLATION 3) Remove the maintenance panel from the oscillator so that the discharge tubes can be checked. Set the door interlock to OFF. 4) Start the oscillator. When a discharge start switch is provided, do not set this switch to ON until after LRDY has been set. 5) Check that th
  • Page 884. INSTALLATION B–70115EN/03 6) Upon the completion of the check, restore the parameters modified in step 1) to their original values. An alarm, if issued in step 5), indicates an error. Check the external laser gas piping and laser gas composition, or perform aging. (4) Beam mode check 1) Remove th
  • Page 89B–70115EN/03 4. INSTALLATION (5) External gas piping leakage check (clamp test) 1) Using an approved gas pipe, connect the gas inlet of the oscillator to the cluster piping, or to the secondary side of the regulator mounted on the gas cylinder. CAUTION Rubber hoses were once commonly used for laser
  • Page 904. INSTALLATION B–70115EN/03 (6) Check for leakage within the oscillator D Negative pressure method 1) On the setting screen, enable parameter rewriting. 2) On the parameter screen, change the setting of parameter No. 15240 (16–L, 16i–L) or parameter No. 235 (0–L) to 0. 3) Set the oscillator start s
  • Page 91B–70115EN/03 4. INSTALLATION D Pressurization CAUTION The turbo blower is not designed to withstand pressurization. So, whenever possible, do not perform a leakage check by pressurizing the turbo blower. Even when internal pressurization is inevitable, never apply a pressure in excess of 0.08 MPa. O
  • Page 924. INSTALLATION B–70115EN/03 CAUTION 1 If the oscillator is started with an incorrect parameter value specified, there is a risk of the oscillator being damaged or destroyed. Be particularly careful when entering and checking parameter values. 2 Some parameters may require modification to, for examp
  • Page 93B–70115EN/03 4. INSTALLATION 2) Set the RUN key to ON to start the oscillator. 3) Perform discharge by setting the HV ON switch to ON. Check that discharge is performed continuously. 4) Then, perform internal discharge using the settings indicated below. Two methods of internal discharge are support
  • Page 944. INSTALLATION B–70115EN/03 4.4 The oscillator has connections for cooling water piping, laser gas piping, and power and signal cables. For details of the electrical connections for OSCILLATOR the NC and machine, refer to the corresponding connection manuals. CONNECTIONS FANUC Series 0–L CONNECTION
  • Page 95B–70115EN/03 4. INSTALLATION Fig. 4.4.1 (b) Water and laser gas connection (C2000C) 93
  • Page 964. INSTALLATION B–70115EN/03 Fig. 4.4.1 (c) Water and laser gas connection (C3000C) 94
  • Page 97B–70115EN/03 4. INSTALLATION Fig. 4.4.1 (d) Water and laser gas connection (C3000D) Fig. 4.4.1 (e) Water and laser gas connection (C4000A) 95
  • Page 984. INSTALLATION B–70115EN/03 Fig. 4.4.1 (f) Water and laser gas connection (C6000B) 4.4.1.1 The quality of cooling water is specified in the table below. If tap water Specification of the is used, it should be treated in an ion exchanger. cooling water Refrigerator/air–conditioner cooling water qual
  • Page 99B–70115EN/03 4. INSTALLATION 4.4.1.2 To avoid cooling water trouble and minimize the frequency of cooling Water treating agent water exchange, the following anticorrosive should be added to the cooling water. Consult the chiller manufacturer for use of the anticorrosive. Product name: CONTLIME K–600
  • Page 1004. INSTALLATION B–70115EN/03 4.4.1.4 If the chiller is used in a cold district, it should be provided with an Anti–freezing agent antifreezing function. When it is extremely cold, the chiller should be kept running. If it is necessary to use an antifreezing solution for lack of an alternative, the f
  • Page 101B–70115EN/03 4. INSTALLATION 4.4.2 Laser Gas 4.4.2.1 Supply the laser oscillator with a mixture of gases that satisfy the Laser gas specification conditions listed below. (1) Composition ratio and accuracy CO2 : 5 "0.25% He : 40 "2.00% N2 : 55 "2.75% (N2 balance) (2) Water (H2O): 5 ppm or less (3) H
  • Page 1024. INSTALLATION B–70115EN/03 4.4.3 The laser oscillator incorporates a safety circuit. The safety circuit is Electrical Connection enabled by using a terminal board (XT20). 4.4.3.1 Figs. 4.4.3.1 (a) to (g) show the cable inlet and the point of connection. NC–to–oscillator Attach the following cable
  • Page 103B–70115EN/03 4. INSTALLATION Fig. 4.4.3.1 (a) Cable connection of C1500B Fig. 4.4.3.1 (b) Cable connection of C2000B 101
  • Page 1044. INSTALLATION B–70115EN/03 Fig. 4.4.3.1 (c) Cable connection of C2000C Fig. 4.4.3.1 (d) Cable connection of C3000C 102
  • Page 105B–70115EN/03 4. INSTALLATION Fig. 4.4.3.1 (e) Cable connection of C3000D Fig. 4.4.3.1 (f) Cable connection of C4000A 103
  • Page 1064. INSTALLATION B–70115EN/03 Fig. 4.4.3.1 (g) Cable connection of C6000B c) OFF interlock signals (OFI1 and OFI2) Making the power supply for the oscillator ready to be switched off turns off these signals. Connect them in parallel with an NC OFF switch. Contact current–carrying capacity: 3 A on 250
  • Page 107B–70115EN/03 4. INSTALLATION b) SHL1 and SHL2 These terminals are for shutter interlocking. Strapping these terminals enables the shutter to be opened and closed. Contact current–carrying capacity: At least 1.2 A on 24 VDC Wire: 1.25 mm2, 25 m or shorter c) IB1 and IB2 These terminals are for semico
  • Page 1084. INSTALLATION B–70115EN/03 4.4.3.2 The figure shows the safety circuit for each oscillator. Details of safety circuit Fig. 4.4.3.2 (a) Safety circuit of C1500B 106
  • Page 109B–70115EN/03 4. INSTALLATION Fig. 4.4.3.2 (b) Safety circuit of C2000B 107
  • Page 1104. INSTALLATION B–70115EN/03 Fig. 4.4.3.2 (c) Safety circuit of C2000C 108
  • Page 111B–70115EN/03 4. INSTALLATION Fig. 4.4.3.2 (d) Safety circuit of C3000C 109
  • Page 1124. INSTALLATION B–70115EN/03 Fig. 4.4.3.2 (e) Safety circuit of C3000D 110
  • Page 113B–70115EN/03 4. INSTALLATION Fig. 4.4.3.2 (f) Safety circuit of C4000A 111
  • Page 1144. INSTALLATION B–70115EN/03 Fig. 4.4.3.2 (g) Safety circuit of C6000B 112
  • Page 115B–70115EN/03 4. INSTALLATION 4.4.4 The C3000C has an oscillator section and auxiliary machine section. Inter–unit Connections Interconnection is made according to the procedure described below. (C3000C Only) 4.4.4.1 (1) Power cable (CP200) Electrical cables This cable feeds 200 VAC to the high–frequ
  • Page 1164. INSTALLATION B–70115EN/03 4.4.4.4 (1) Connect gas OUT of the oscillator section to gas IN of the auxiliary Gas piping machine section, using the gas pipe provided with the oscillator. (2) Supply laser gas through gas IN of the oscillator section. Exhaust gas from the exhaust pump is output throug
  • Page 117B–70115EN/03 5. MAINTENANCE 5 MAINTENANCE In FANUC LASER C series, periodic inspection items have been reduced, and adjustments have been made easy. To keep the oscillator in a satisfactory operating condition over a long period, however, it is necessary to carry out periodic maintenance (including
  • Page 1185. MAINTENANCE B–70115EN/03 5.1 Table 5.1 lists daily inspection items. Inspect the FANUC LASER C series according to this table. When parts (including oil) have been used DAILY INSPECTION for a prescribed period, replace them quickly. Table 5.1 Daily inspection items for FANUC LASER C series Item P
  • Page 119B–70115EN/03 5. MAINTENANCE 5.2 The FANUC LASER C series contains consumables that must be replaced periodically. Table 5.2 (a), (b) lists such consumables and the PERIODIC related periodic maintenance work. Perform periodic maintenance as MAINTENANCE well as daily inspection described in Section 5.
  • Page 1205. MAINTENANCE B–70115EN/03 Table 5.2 (b) Periodic maintenance items and periods Interval of maintenance (Operation hour) Item C4000A C6000B 1 Output mirror cleaning 800 to 1200h 800 to 1200h 2 Rear mirror cleaning 3 Folding mirror cleaning 3000 to 4000h 1000h or processing quality go 4 0–shift mirr
  • Page 121B–70115EN/03 5. MAINTENANCE 5.3 When opening the panels and doors during maintenance, keep the power turned off. DETAILS OF Before replacing oil, be sure to check that purging is completed. MAINTENANCE Fig. 5.3 (a) Oil gauge of Turbo Blower and Exhaust pump of C1500B Fig. 5.3 (b) Oil gauge of Turbo
  • Page 1225. MAINTENANCE B–70115EN/03 Fig. 5.3 (c) Oil gauge of Turbo Blower and Exhaust pump of C2000C Fig. 5.3 (d) Oil gauge of Turbo Blower and Exhaust pump of C3000C 120
  • Page 123B–70115EN/03 5. MAINTENANCE Fig. 5.3 (e) Oil gauge of Turbo Blower and Exhaust pump of C3000D Fig. 5.3 (f) Oil gauge of Turbo Blower and Exhaust pump of C4000A 121
  • Page 1245. MAINTENANCE B–70115EN/03 Fig. 5.3 (g) Oil gauge of Turbo Blower and Exhaust pump of C6000B 5.3.1 (1) Check method Turbo Blower Oil Check the amount of oil in the turbo blower while referring to the figure below. The oil level should be between graduations H and L. This check should be made when t
  • Page 125B–70115EN/03 5. MAINTENANCE 3) Clean the oil inlet, hexagonal–head screw of the oil inlet, and O–ring by wiping with a clean cloth or paper. Ensure that these parts are completely free of dust. If the oil is contaminated with dust, the turbo blower may fail. Set the O–ring in the groove around the h
  • Page 1265. MAINTENANCE B–70115EN/03 5.3.2 (1) Check method Exhaust Pump Oil Watch the oil gauge, and check that the oil level is between graduations L and H. Also check whether the oil is dark. If the oil level is below L, add oil to the turbo blower or replace the oil in it. If the oil level is above H, dr
  • Page 127B–70115EN/03 5. MAINTENANCE 8) Put the maintenance panel back in place, and turn on the power. SCREW KNOB FILTER COVER O–RING SPRING WASHER EXHAUST FILTER ELEMENT OIL INLET PLUG Fig. 5.3.3 Exchange of exhaust pump filter 125
  • Page 1285. MAINTENANCE B–70115EN/03 5.3.4 Replace the filter every 1500 hours, or when oil mist occurs. Fig. 5.3.4 Exhaust System Filter shows the exhaust system filter. None of the C1500B, C2000B, C2000C, C3000C, C3000D, and C4000A is equipped with this filter. (1) Replacement method Clamp Housing head Hou
  • Page 129B–70115EN/03 5. MAINTENANCE 10) Take out a new cartridge filter (A97L–0201–0211, AdvanTech Toyo TCG–045–SIFS) from its bag, and put a plate gasket (supplied together with the cartridge filter) on both ends of the filter. 11) Insert the cartridge filter into the housing head, and fasten it with the f
  • Page 1305. MAINTENANCE B–70115EN/03 5.4 The maintenance parts are listed below. Refer to the following tables for maintenance unit and part specification information. MAINTENANCE PARTS NONREPAIRABLE PARTS MODEL QUANTITY NAME SPECIFICATION NOTE C1500B C2000B C2000C C3000C C3000D C4000A C6000B OUTPUT COUPLER
  • Page 131B–70115EN/03 5. MAINTENANCE MODEL QUANTITY NAME SPECIFICATION NOTE C1500B C2000B C2000C C3000C C3000D C4000A C6000B O RING FOR A98L–0003–0004/P22.4S 8 0 0 0 0 0 0 DISCHARGE TUBE A98L–0003–0004/P26S 0 8 8 12 12 16 0 A98L–0003–0004/P30.6S 0 0 0 0 0 0 24 O–RING FOR GAS A98L–0003–0004/P58 8 8 8 0 0 0 0
  • Page 1325. MAINTENANCE B–70115EN/03 MODEL QUANTITY NAME SPECIFICATION NOTE C1500B C2000B C2000C C3000C C3000D C4000A C6000B EXHAUST PUMP OIL A98L–0040–0093/1.0L6 3.6L 3.6L 3.6L 3.6L 3.6L 3.6L 3.6L TURBO BLOWER OIL A04B–0800–K326 1/3 1/3 1/3 2/3 1/3 1/3 4/3 O–RING FOR TURBO JB–OR4D–P10A 1 1 1 2 1 1 4 BLOWER
  • Page 133B–70115EN/03 5. MAINTENANCE MODEL QUANTITY NAME SPECIFICATION NOTE C1500B C2000B C2000C C3000C C3000D C4000A C6000B AUTO BREAKER A60L–0001–0312/BESCN 1 0 0 0 0 0 0 RELEASE AC100V #4 QF1 AUTO BREAKER A60L–0001–0312/BESDN 1 0 0 0 0 0 0 RELEASE DC24V #4 QF1 AUTO BREAKER A60L–0001–0312/BGSDN 0 1 1 1 1 0
  • Page 1345. MAINTENANCE B–70115EN/03 MODEL QUANTITY NAME SPECIFICATION NOTE C1500B C2000B C2000C C3000C C3000D C4000A C6000B MG CONTACTOR A58L–0001–0243 0 0 3 0 4 5 8 KM1–3 KM1–4 KM1–5 KM1–4, 7–10 A58L–0001–0313/ 0 0 1 0 1 1 1 A2A3P13 KM5 KM5 MS6 KM6 A58L–0001–0330/A2A 0 0 1 0 1 1 1 KM4 KM6 KM7 KM5 A58L–0001
  • Page 135B–70115EN/03 5. MAINTENANCE MODEL QUANTITY NAME SPECIFICATION NOTE C1500B C2000B C2000C C3000C C3000D C4000A C6000B GAS FILTER A97L–0200–0649/2–2–S 1 1 1 1 1 1 1 A97L–0200–0649/ 1 1 1 1 1 1 1 2–0.5–S CARTRIDGE FILTER A97L–0201–0211 0 0 0 0 0 0 1 NYLON FERRULE 1/4″ A98L–0004–0348/2–N 16 16 16 20 18 1
  • Page 1365. MAINTENANCE B–70115EN/03 MODEL QUANTITY NAME SPECIFICATION NOTE C1500B C2000B C2000C C3000C C3000D C4000A C6000B FET MODULE PCB A20B–1006–0050 8 STEPUP A20B–1006–0070 1 TRANSFORMER PCB RF INVERTER PCB A20B–1006–0060 1 DIODE A50L–2001–0257/F 6 A50L–2001–0257/R 6 DIODE HEAT SINK A A50L–6001–0569 4
  • Page 137B–70115EN/03 5. MAINTENANCE MODEL QUANTITY NAME SPECIFICATION NOTE C1500B C2000B C2000C C3000C C3000D C4000A C6000B FET MODULE PCB A20B–1007–0140 1 A20B–1007–0150 1 This column is quantity of PSU parts per one LPSU. STEPUP A20B–1006–0072 1 (B210) TRANSFORMER PCB DIODE A50L–2001–0439 6 135
  • Page 1385. MAINTENANCE B–70115EN/03 REPAIRABLE PARTS MODEL QUANTITY NAME SPECIFICATION NOTE C1500B C2000B C2000C C3000C C3000D C4000A C6000B LASER PSU UNIT A14B–0082–B204 (2) 0 0 (2) 0 0 0 A14B–0082–B205 0 (4) 0 (2) 0 0 (4) A14B–0082–B206 0 0 0 0 0 0 (4) A14B–0082–B207 (2) 0 (2) (2) (3) 0 (4) A14B–0082–B208
  • Page 139B–70115EN/03 5. MAINTENANCE MODEL QUANTITY NAME SPECIFICATION NOTE C1500B C2000B C2000C C3000C C3000D C4000A C6000B CONNECTION PCB A16B–1700–0460 0 0 0 0 0 1 0 TERMINAL PCB A16B–1700–0470 0 0 0 0 0 1 0 STABILIZED PSU A20B–1005–0124 1 1 1 1 1 1 1 POWER SENSOR A04B–0803–D001 1 0 0 0 0 0 0 UNIT A04B–08
  • Page 1405. MAINTENANCE B–70115EN/03 MODEL QUANTITY NAME SPECIFICATION NOTE C1500B C2000B C2000C C3000C C3000D C4000A C6000B WATER DISTRIBUTOR A04B–0810–C420 1 0 0 0 0 0 0 A04B–0807–C420 0 1 0 0 1 0 0 A04B–0813–C420 0 0 1 0 0 0 0 A04B–0811–C420 0 0 0 1 0 0 0 A04B–0814–C420 0 0 0 0 1 0 0 A04B–0815–C420 0 0 0
  • Page 141B–70115EN/03 5. MAINTENANCE #14 Use the service stock for the model specified in this list. Specify A20B–1005–0124 when newly ordering. #15 Use the service stock for the model specified in this list. Specify A91L–0001–0201 when newly ordering. When A91L–0001–0102 is installed, the following parts ar
  • Page 1426. TROUBLESHOOTING B–70115EN/03 6 TROUBLESHOOTING 140
  • Page 143B–70115EN/03 6. TROUBLESHOOTING 6.1 The troubleshooting procedure to be applied depends on the failure occurrence status as indicated below. Perform checking according to the TROUBLESHOOTING items listed below. PROCEDURE (1) Action in response to alarm screen display (See Sections 6.2 and 6.3.) (2)
  • Page 1446. TROUBLESHOOTING B–70115EN/03 6.3 The alarm number, DGN, and parameter number (PRM NO.) vary with the CNC model. So, the FS16–L or FS16i–L number comes first, and the RESPONDING TO FS0–L number is enclosed in parentheses. ALARM MESSAGES ON THE SCREEN Alarm No. 4061 [661] Anomaly of AD converter 1
  • Page 145B–70115EN/03 6. TROUBLESHOOTING Alarm No. 4063 [663] Anomaly of laser power supply unit (Refer to DGN 966, 967, 974, 975 [842, 854].) This alarm is issued, if a fault occurs in the laser power supply unit. The cause of the fault and the required action are described below. The laser power supply uni
  • Page 1466. TROUBLESHOOTING B–70115EN/03 No. Phenomenon Presumption cause 5 The RF voltage of all the units is high dur- The external laser gas ing discharge and the laser power is low. pipe is abnormal. The base discharge is narrow and tends to disappear. When the purge is repeatedly performed, the RF volta
  • Page 147B–70115EN/03 6. TROUBLESHOOTING Alarm No. 4065 [665] Shutter anomaly (Related DGNs are shown below.) The table below lists the valid combinations of shutter open and close commands and open and close position detection signals. The shutter position is detected three seconds after opening or closing
  • Page 1486. TROUBLESHOOTING B–70115EN/03 Alarm No. 4066 [666] Discharge anomaly (Refer to DGN = 909 to 914 [861 to 868] Pressing the HVON (start discharge) button causes the unit to start discharging. This alarm is issued, if at least one discharge tube fails to operate. No. Cause of trouble Solution 1 Anoma
  • Page 149B–70115EN/03 6. TROUBLESHOOTING Alarm No. 4067 [667] Overheat of laser cabinet (Refer to DGN = 961/bit 1 [841/bit7]) The temperature of the input side of the electrode cooling fan is monitored and sends alarm when it exceeds 60°C. When the temperature decreases, the alarm state is solved automatical
  • Page 1506. TROUBLESHOOTING B–70115EN/03 Alarm No. 4068 [668] Too much incident laser beam back to the resonator. (Refer to DGN = 906 [878]) This alarm is issued, if a workpiece reflects laser beam more than the rating to the laser oscillator. This can happen when the laser beam is used to drill, cut, or wel
  • Page 151B–70115EN/03 6. TROUBLESHOOTING Alarm No. 4071 [671] Anomaly of assist gas (Refer to DGN = G221/bit 7 [145/bit7] When starting machining, the NC monitors for a ready signal from the assist gas supply unit in the machine. If this signal is not sent normally, the NC issues this alarm. Check the DGN da
  • Page 1526. TROUBLESHOOTING B–70115EN/03 Alarm No. 4073 [673] Decrease of laser gas pressure (Refer to DGN = 960/bit 5 [840/bit 4]) The pressure of the laser gas supplied to the laser oscillator is monitored. This alarm is issued, if this pressure becomes lower than the permissible level (0.1 MPa). No. Cause
  • Page 153B–70115EN/03 6. TROUBLESHOOTING Alarm No. 4075 [675] Condensation (Refer to DGN = 961/bit 2 [840/bit 6]) There is a condensation sensor at the inlet of the water branch unit in the oscillator. This alarm is issued, when condensation is detected. No. Cause of trouble Solution 1 Tool low cooling water
  • Page 1546. TROUBLESHOOTING B–70115EN/03 Alarm No. 4077 [677] Overheat of beam absorber (Refer to DGN = 961/bit 7 [841/bit 3]) Laser beam is introduced into the beam absorber, when the oscillation takes place with shutter closed. This absorber is water–cooled and sends alarm when the temperature exceeds a cr
  • Page 155B–70115EN/03 6. TROUBLESHOOTING Alarm No. 4078 [678] Gas pressure anomaly in discharge tube (Refer to DGN = 905 [860]) The gas pressure is monitored after the discharge start ready condition (LRDY) is established. This alarm is issued, if the monitored gas pressure deviates by "100 (="1330 Pa) from
  • Page 1566. TROUBLESHOOTING B–70115EN/03 Alarm No. 4080 [680] Leakage of gas tube/anomaly of exhaust pump (Refer to DGN = 905 [860]) When the RUN (pressure control start) button is pressed, the exhaust pump starts operating and expels gas from the gas circulating system to cause a low–pressure condition. Thi
  • Page 157B–70115EN/03 6. TROUBLESHOOTING Alarm No. 4081 [681] Anomaly of gas pressure control (Refer to DGN = 905 [860] Pressing the RUN (pressure control start) button starts expelling air from the laser gas tube. When a specified degree of vacuum is attained, laser gas is supplied into the laser gas tube,
  • Page 1586. TROUBLESHOOTING B–70115EN/03 Alarm No. 4082 [682] Anomaly of pressure sensor (Refer to DGN = 905 [860] This alarm appears when the signal of the pressure sensor used for pressure control detector vanishes. No. Cause of trouble Solution 1 Disconnected cable be- Check the cable connection. If the c
  • Page 159B–70115EN/03 6. TROUBLESHOOTING Alarm No. – – – [684] Anomalous selection of the number of discharge tubes. Anomalous selection of the number of discharge tubes. (Only FS0–L) No. Cause of trouble Solution 1 The case of FS0–L. The number of discharge tubes should be The number of discharge selected t
  • Page 1606. TROUBLESHOOTING B–70115EN/03 Alarm No. 4087 [687] Shutter temperature abnormal (Refer to bit 6 of DGN 961 [bit 2 of 841].) This alarm is issued when the temperature of the shutter mirror exceeds a preset maximum. The table below lists the causes of faults and the corresponding countermeasures. No
  • Page 161B–70115EN/03 6. TROUBLESHOOTING Alarm No. 4090 [690] Laser beam not generated (Refer to bit 6 of DGN F221 [bit 6 of 172].) This alarm is issued, if an attempt is made to radiate a laser beam, when the laser oscillator is not in the LSTR state (discharging state). Alarm No. 4094 [– – –] Exhaust pump
  • Page 1626. TROUBLESHOOTING B–70115EN/03 Alarm No. 4100 [691] Inverter abnormal If the inverter used to power the turbo blower is abnormal, this alarm is issued. When this alarm is issued, check that the alarm LED on the LED indicator section of the inverter is lit. At this time, do not turn off the power to
  • Page 163B–70115EN/03 6. TROUBLESHOOTING Alarm No. Turbo blower not stopped 4103, 4113 [691] This alarm is issued if a turbo blower is not stopped within 120 seconds after RUN OFF. The power can be turned off even if the purge complete signal is not turned on. No. Cause of trouble Solution 1 Cable connection
  • Page 1646. TROUBLESHOOTING B–70115EN/03 Alarm No. 4107 [621] External reflecting mirror not installed This alarm is issued, if the beam reflecting unit is not attached with a mirror or mirror holder. No. Cause of trouble Solution 1 Mirror not mounted Mount a 0–degree shift mirror. 2 Sensor abnormal Replace
  • Page 165B–70115EN/03 6. TROUBLESHOOTING 6.4 MAJOR FAULTS 6.4.1 (1) If an alarm is issued to indicate the occurrence of a power supply fault, Laser Power Supply check the diagnosis screen to determine which power supply unit issued that alarm signal. The bit corresponding to the power supply Alarm Display un
  • Page 1666. TROUBLESHOOTING B–70115EN/03 (4) Table 6.4.1 explains each type of alarm. Table 6.4.1 Causes of power supply alarms Type of alarm Source Major causes DCI 1 This alarm is issued if the DC Load short–circuit DCI 2 current of the power supply unit DCI 3 is high when the oscillator is op- Discharge t
  • Page 167B–70115EN/03 6. TROUBLESHOOTING (5) If an alarm is issued at restart or at the start of discharge (HV ON), the power supply unit has been damaged. 1) When only the DCI alarm is issued The high–speed diode or FET module may be damaged. Locate the problem and replace any faulty component or module. 2)
  • Page 1686. TROUBLESHOOTING B–70115EN/03 6.4.5 First check if PRM No. 15216 [262] is taking the value of 60, which is Display of Fluctuating a standard. In case the fluctuation continues with this value used, read the laser output monitor value indicated in DGN=906 [878]. Its range of Laser Output on CRT flu
  • Page 169B–70115EN/03 6. TROUBLESHOOTING 6.4.7 Electromagnetic No. Cause of trouble Solution Contactor of Vane 1 Anomalous setting Ascertain if the setting of the contacter is done at Pump Trips Thermally. of thermal relay 5.5 A. If not so, correct it. 2 Too high viscosity (1) Check if the room temperature i
  • Page 1706. TROUBLESHOOTING B–70115EN/03 6.4.9 Excessive Laser Gas No. Cause of trouble Solution Consumption 1 Gas leakage be- Ascertain the following. tween gas cylinder (1) Anomalous mounting of regulator. and oscillator (2) Anomalous connection between tube and reg- ulator. (3) Anomalous connection of gas
  • Page 171B–70115EN/03 6. TROUBLESHOOTING OC : Momentary overcurrent No. Cause of trouble Solution 1 Turbo blower or cable short–cir- Replace the short–circuited unit or cuited cable. 2 Turbo blower or cable short–cir- Replace the short–circuited unit or cuited with ground cable. 3 Invalid setting of inverter
  • Page 1726. TROUBLESHOOTING B–70115EN/03 (2) Inverter (A90L–0001–0464/CE, 0465/CE: Model JH300) When an alarm is issued, the digital panel displays a message indicating the type of alarm. The table below lists the messages, descriptions, and causes. Message Description Cause E01 Overcurrent during turbo blow
  • Page 173B–70115EN/03 6. TROUBLESHOOTING 6.5 OBSERVING VOLTAGE OF POWER LINE 6.5.1 Ascertain the followings, Measurement of 1) line voltage: 200/220 VAC, +10%, –15% Voltage 2) frequency: 50/60 Hz – 1 Hz 3) 3 phases Here the combination of 220 V and 50 Hz is prohibited. 6.5.2 Using a phase rotation sensor, L1
  • Page 1746. TROUBLESHOOTING B–70115EN/03 6.5.3 Ascertain if the voltage of each DC power unit is within rated range. Here Measurement of refer to Fig. 6.5.3 (a), (b), (c) for the external view of the IF PCB in the oscillator. Refer to Fig. 6.5.3 (d) for the external view of the stabilized Voltage of DC Power
  • Page 175B–70115EN/03 6. TROUBLESHOOTING (4) Stabilized power supply unit Fig. 6.5.3 (d) shows the external appearance of +24V stabilized power unit. Fuse of the stabilized power supply unit Designation of power supply unit A20B–1005–0120 Designation of fuse FU : A60L–0001–0175#5.0 (5.0A) FU : A60L–0001–0175
  • Page 1766. TROUBLESHOOTING B–70115EN/03 COPIA COPIB Ï CN CN CN CN CN CN CN CN CN CN CN 23 11 12 13 14 15 16 17 18 24 25 123 Ï Ï SP5 Ï RELAY 123 G6B LPW SP6 Ï MBI JD1A JD1B LB6 Ï PTM LTP COR Ï CN34 CII RII Ï A/D MOUT A/D Ï CONVERTOR1 A16B–1110–0260 CONVERTOR2 SPI Ï 123 GPC 5 Ï 123 +24 0 –15 15 SP2 Ï 123 SP3
  • Page 177B–70115EN/03 6. TROUBLESHOOTING COR GPC MOUT LPW LTP CN CN CN CN CN CN CN CN1 0 23 11 12 13 14 24 25 +5 CNX CN2 –15 SHUTTER +15 RELAY +24 (A58L–0001–0265#24P) LA4 0 ÏÏ ÏÏ F1 ÏÏ ÏÏ A16B–1110–022 ÏÏ Ï ÏÏ F2 A10 0 F3 ÏÏ PATLITE RELAY (A58L–0001–0265#24P) ÏÏ ÏÏ LF16 Fig. 6.5.3 (c) External appearance of
  • Page 1786. TROUBLESHOOTING B–70115EN/03 6.5.4 By using the IF PCB pins, check that each signal of the IF PCB is normal. Checking the IF PCB Fig. 6.5.3 (a) and Fig. 6.5.3 (b) show the pin locations. Signals FS0–L FS16–L Signal function FS16i–L COR COR Voltage to operate the laser power supply 0 V to 5V GPC G
  • Page 179B–70115EN/03 6. TROUBLESHOOTING 6.6 When the machine breaks down, it is necessary to know if the trouble is in the CNC, PMC, machine or laser. INDICATION OF Even when there does not exist machine failure, the machine might STATE BY MEANS OF hang–up for waiting of external signals. Then the check of
  • Page 1806. TROUBLESHOOTING B–70115EN/03 #7 #6 #5 #4 #3 #2 #1 #0 G223 POV7 POV6 POV5 POV4 POV3 POV2 POV1 POV0 [G147] POV7 – POV6 Power override signal (input) [CNC→PMC status display] #7 #6 #5 #4 #3 #2 #1 #0 F220 MWRM SHTONL SHTOFL [F171] MWRM Laser power alarm signal (output) SHTONL Shutter on state signal
  • Page 181B–70115EN/03 6. TROUBLESHOOTING 6.6.2 Laser Oscillator Status Display (FS16–L, 16i–L) 900 LASER POWER COMMAND DOIML0A Displays a value specified in a laser output power command and sent to the DA converter. 901 LASER BIAS COMMAND DOIML08 Displays a value specified in a preparatory discharge command
  • Page 1826. TROUBLESHOOTING B–70115EN/03 909 RF VOLTAGE 1 910 RF CURRENT 1 911 RF VOLTAGE 2 912 RF CURRENT 2 913 RF VOLTAGE 3 914 RF CURRENT 3 915 RF VOLTAGE 4 916 RF CURRENT 4 917 RF VOLTAGE 1 918 RF CURRENT 1 919 RF VOLTAGE 2 920 RF CURRENT 2 921 RF VOLTAGE 3 922 RF CURRENT 3 923 RF VOLTAGE 4 924 RF CURREN
  • Page 183B–70115EN/03 6. TROUBLESHOOTING FRQ Power frequency detection 0 : 50 Hz 1 : 60 Hz *AP Air pressure sensor 0 : Lower than air pressure 1 : Same as air pressure *MGP Laser gas pressure 0 : Low 1 : Normal *RBT Blower temperature 0 : Abnormal 1 : Normal *SFI Safety interlock 0 : Interlocked 1 : Normal #
  • Page 1846. TROUBLESHOOTING B–70115EN/03 #7 #6 #5 #4 #3 #2 #1 #0 962 *OH1 *TCA1 *M–R *L–V *AR1 *IAL1 DIIML02 *IAL1 Inverter alarm 1 0 : Abnormal 1 : Normal *AR1 Frequency signal 1 0 : Mismatch 1 : Match *L–V Turbo blower oil 0 : Oil level too low 1 : Normal *M–R External folding mirror 0 : Mirror not mounted
  • Page 185B–70115EN/03 6. TROUBLESHOOTING #7 #6 #5 #4 #3 #2 #1 #0 964 *OH3 *TCA3 *REV3 *VIB3 *AR3 *IAL3 DIIML04 *IAL3 Inverter alarm 3 0 : Abnormal 1 : Normal *AR3 Frequency signal 3 0 : Mismatch 1 : Match *VIB3 Vibration sensor 3 0 : Abnormal 1 : Normal *REV3 Rotation sensor 3 0 : Less than 8000 rpm 1 : 8000
  • Page 1866. TROUBLESHOOTING B–70115EN/03 #7 #6 #5 #4 #3 #2 #1 #0 970 PS08 PS07 PS06 PS05 PS04 PS03 PS02 PS01 DOIML02 PS01 – PS08 Power select signals 1 to 8 0 : Not selected 1 : Selected #7 #6 #5 #4 #3 #2 #1 #0 972 TWV BPV PTL GRDY VEN RPA RBA PUG DOIML04 PUG Purge valve 0: Closed 1: Open RBA Turbo blower ac
  • Page 187B–70115EN/03 6. TROUBLESHOOTING IB Semiconductor laser–on command 0: OFF 1: ON FW Inverter start signal 0: Stopped 1: Started PCS Gas pressure PWM command LSCST Low speed A/D conversion start 0: OFF 1: ON #7 #6 #5 #4 #3 #2 #1 #0 974 PSAR8 PSAR7 PSAR6 PSAR5 PSAR4 PSAR3 PSAR2 PSAR1 R@LSDIC2 Power unit
  • Page 1886. TROUBLESHOOTING B–70115EN/03 6.6.3 Laser Oscillator Status Display (FS0–L) DGN No #7 #6 #5 #4 #3 #2 #1 #0 88 Output command value + Bias command 89 (CNC internal DO) Displays a value specified in a laser output power command and sent to the DA converter. DGN No #7 #6 #5 #4 #3 #2 #1 #0 90 Bias com
  • Page 189B–70115EN/03 6. TROUBLESHOOTING MVW Quantity of cooling water 0 : Abnormal 1 : Normal AP Atmospheric pressure sensor 0 : Less than standard value 1 : Greater than standard value DGN No #7 #6 #5 #4 #3 #2 #1 #0 841 CAT SHOF SHON DL1 ABT SHT IAL ENB (CNC internal DI) CAT Cabinet temperature 0 : Abnorma
  • Page 1906. TROUBLESHOOTING B–70115EN/03 DGN No #7 #6 #5 #4 #3 #2 #1 #0 846 ADDT2 847 EOC2 (CNC internal DI) ADDT2 Data read from the AD converter 2 EOC2 Conversion completion signal of the AD converter 2 0: Under conversion 1: Completion DGN No #7 #6 #5 #4 #3 #2 #1 #0 848 PCBID (CNC internal DI) PCBID PCB A
  • Page 191B–70115EN/03 6. TROUBLESHOOTING SEL4 – SEL0 AD converter 2 switching signal SEL4 SEL3 SEL2 SEL1 SEL0 Pressure in side tube 0 0 0 0 0 Output voltage of RF power supply unit (1) 0 0 0 0 1 Output current of RF power supply unit (1) 0 0 0 1 0 Output voltage of RF power supply unit (2) 0 0 0 1 1 Output c
  • Page 1926. TROUBLESHOOTING B–70115EN/03 GRDY Laser gas supply valve open/close signal 0 : Laser gas supply valve close 1 : Laser gas supply valve open VEN Exhaust valve open/close signal 0 : Exhaust valve close 1 : Exhaust valve open DGN No #7 #6 #5 #4 #3 #2 #1 #0 857 PSS8 PSS7 PSS6 PSS5 PSS4 PSS3 PSS2 PSS1
  • Page 193B–70115EN/03 6. TROUBLESHOOTING DGN No 877 EIN (CNC internal DI) EIN Input from tracing sensor. (Value which is not multiplied by the correction factor) +10V . . . . . . 2047 0V . . . . . . 0 –10V . . . . . . –2047 DGN No 878 LSADC (CNC internal DI) LSADC Power sensor output. (Unit W) (Value which i
  • Page 1947. OSCILLATOR CONNECTIONS B–70115EN/03 7 OSCILLATOR CONNECTIONS 192
  • Page 195B–70115EN/03 7. OSCILLATOR CONNECTIONS 7.1 ELECTRICAL CONNECTIONS Fig. 7.1 (a) Electrical connection diagram (C1500B) 193
  • Page 1967. OSCILLATOR CONNECTIONS B–70115EN/03 Fig. 7.1 (b) Electrical connection diagram (C2000B) 194
  • Page 197B–70115EN/03 7. OSCILLATOR CONNECTIONS Fig. 7.1 (c) Electrical connection diagram (C2000C) 195
  • Page 1987. OSCILLATOR CONNECTIONS B–70115EN/03 Fig. 7.1 (d) Electrical connection diagram (C3000C) 196
  • Page 199B–70115EN/03 7. OSCILLATOR CONNECTIONS Fig. 7.1 (e) Electrical connection diagram (C3000D) 197
  • Page 2007. OSCILLATOR CONNECTIONS B–70115EN/03 Fig. 7.1 (f) Electrical connection diagram (C4000A) 198
  • Page 201B–70115EN/03 7. OSCILLATOR CONNECTIONS Fig. 7.1 (g) Electrical connection diagram (C6000B) 199
  • Page 2027. OSCILLATOR CONNECTIONS B–70115EN/03 7.2 COOLING WATER PIPING 200
  • Page 203B–70115EN/03 7. OSCILLATOR CONNECTIONS Fig. 7.2 (a) Water flow diagram (C1500B) 201
  • Page 2047. OSCILLATOR CONNECTIONS B–70115EN/03 Fig. 7.2 (b) Water flow diagram (C2000B) 202
  • Page 205B–70115EN/03 7. OSCILLATOR CONNECTIONS Fig. 7.2 (c) Water flow diagram (C2000C) 203
  • Page 2067. OSCILLATOR CONNECTIONS B–70115EN/03 Fig. 7.2 (d) Water flow diagram (C3000C) 204
  • Page 207B–70115EN/03 7. OSCILLATOR CONNECTIONS Fig. 7.2 (e) Water flow diagram (C3000D) 205
  • Page 2087. OSCILLATOR CONNECTIONS B–70115EN/03 Fig. 7.2 (f) Water flow diagram (C4000A) 206
  • Page 209B–70115EN/03 7. OSCILLATOR CONNECTIONS Fig. 7.2 (g) Water flow diagram (C6000B) 207
  • Page 2107. OSCILLATOR CONNECTIONS B–70115EN/03 7.3 Fig. 7.3 (a) shows the flow of supply gas and exhaust gas in the laser oscillator. Figs. 7.3 (b) to (h) are system diagrams showing the piping in GAS PIPING the laser oscillator. Pressure value 100 (=1330Pa) or more Pressure value 300 to 700 (=4000 to9300Pa
  • Page 211B–70115EN/03 7. OSCILLATOR CONNECTIONS Fig. 7.3 (b) Laser gas flow diagram (C1500B) 209
  • Page 2127. OSCILLATOR CONNECTIONS B–70115EN/03 Fig. 7.3 (c) Laser gas flow diagram (C2000B) 210
  • Page 213B–70115EN/03 7. OSCILLATOR CONNECTIONS Fig. 7.3 (d) Laser gas flow diagram (C2000C) 211
  • Page 2147. OSCILLATOR CONNECTIONS B–70115EN/03 Fig. 7.3 (e) Laser gas flow diagram (C3000C) 212
  • Page 215B–70115EN/03 7. OSCILLATOR CONNECTIONS Fig. 7.3 (f) Laser gas flow diagram (C3000D) 213
  • Page 2167. OSCILLATOR CONNECTIONS B–70115EN/03 Fig. 7.3 (g) Laser gas flow diagram (C4000A) 214
  • Page 217B–70115EN/03 7. OSCILLATOR CONNECTIONS Fig. 7.3 (h) Laser gas flow diagram (C6000B) 215
  • Page 2188. UNIT CONFIGURATION B–70115EN/03 8 UNIT CONFIGURATION 216
  • Page 219B–70115EN/03 8. UNIT CONFIGURATION 8.1 The input unit consists of a power magnetics cabinet, interface PCB, and stabilized power supply. The power magnetics cabinet is configured as INPUT UNIT described below: (1) C1500B Input unit (C1500B) QF1 QF2 Thermal KM1 PSU Relay No. 1 Thermal Relay Thermal P
  • Page 2208. UNIT CONFIGURATION B–70115EN/03 Fig. 8.1 (a) Input unit (C1500B) 218
  • Page 221B–70115EN/03 8. UNIT CONFIGURATION (2) C2000B Input unit (C2000B) QF1 Thermal KM1 PSU QF2 Relay No. 1 Thermal Relay Thermal PSU QF3 KM2 Relay No. 2 Thermal KM3 PSU QF4 Relay No. 3 Thermal PSU QF5 Relay KM4 No. 4 Thermal Inverter Turbo QF6 KM5 Relay blower Thermal Exhaust QF7 KM6 Relay pump Hour mete
  • Page 2228. UNIT CONFIGURATION B–70115EN/03 Fig. 8.1 (b) Input unit (C2000B) 220
  • Page 223B–70115EN/03 8. UNIT CONFIGURATION (3) C2000C Input unit (C2000C) QF1 QF2 KM1 PSU No. 1 Thermal Relay PSU QF3 KM2 No. 2 QF4 KM3 Inverter Turbo blower QF5 KM4 AC FAN Thermal Exhaust Hour QF6 KM5 Relay pump meter Transformer Magnetic valve QF7 QF8 Stabilized PSU unit IF PCB CNC INPUT UNIT AS ALARM SHO
  • Page 2248. UNIT CONFIGURATION B–70115EN/03 Fig. 8.1 (c) Input unit (C2000C) 222
  • Page 225B–70115EN/03 8. UNIT CONFIGURATION (4) C3000C Input unit (C3000C) QF1 Thermal PSU QF2 KM1 Relay No. 1 Thermal relay Thermal PSU QF3 KM2 Relay No. 2 Thermal PSU QF4 KM3 Relay No. 3 Thermal PSU QF5 KM4 Relay No. 4 Thermal QF6 AUXLIARY UNIT Relay QF7 KM5 AC FAN Magnetic valve QF8 Transformer QF9 Stabil
  • Page 2268. UNIT CONFIGURATION B–70115EN/03 Fig. 8.1 (d) Input unit (C3000C) 1/2 224
  • Page 227B–70115EN/03 8. UNIT CONFIGURATION Fig. 8.1 (d) Input unit (C3000C AUX) 2/2 225
  • Page 2288. UNIT CONFIGURATION B–70115EN/03 (5) C3000D Input unit (C3000D) QF1 QF2 KM1 PSU No. 1 Thermal Relay PSU QF3 KM2 No. 2 KM3 PSU QF4 No. 3 Inverter Turbo QF5 KM4 blower Thermal Exhaust Hour QF6 KM5 Relay pump meter QF8 Intermediate unit Magnetic valve Transformer QF9 Stabilized PSU IF PCB QF7 KM6 AC
  • Page 229B–70115EN/03 8. UNIT CONFIGURATION Fig. 8.1 (e) Input unit (C3000D) 227
  • Page 2308. UNIT CONFIGURATION B–70115EN/03 (6) C4000A Input unit (C4000A) QF1 PSU QF2 KM1 No. 1 Thermal Relay PSU QF3 KM2 No. 2 KM3 PSU QF4 No. 3 PSU QF5 KM4 Inverter No. 4 KM5 Inverter Turbo QF6 blower Thermal Exhaust Hour QF7 KM6 Relay pump meter QF9 Intermediate unit Magnetic valve Transformer QF10 Stabi
  • Page 231B–70115EN/03 8. UNIT CONFIGURATION Fig. 8.1 (f) Input unit (C4000A) 229
  • Page 2328. UNIT CONFIGURATION B–70115EN/03 (7) C6000B Input unit (C6000B) QF1 PSU QF2 KM1 No. 1 Thermal Relay QF3 KM2 PSU No. 2 KM3 PSU QF4 No. 3 PSU QF5 KM4 No. 4 QF6 KM5 AC FAN Thermal Exhaust Hour QF7 KM6 Relay pump meter KM7 PSU QF8 No. 5 PSU QF9 KM8 No. 6 PSU QF10 KM9 No. 7 PSU QF11 KM10 No. 8 Turbo In
  • Page 233B–70115EN/03 8. UNIT CONFIGURATION Fig. 8.1 (g) Input unit (C6000B) 1/3 231
  • Page 2348. UNIT CONFIGURATION B–70115EN/03 Fig. 8.1 (g) Input unit (C6000B) 2/3 232
  • Page 235B–70115EN/03 8. UNIT CONFIGURATION Fig. 8.1 (g) Input unit (C6000B) 3/3 233
  • Page 2368. UNIT CONFIGURATION B–70115EN/03 8.2 Intermediate PCB B is used to group signals sent from the shutter section and to output the grouped signals to the interface PCB. CN59 is an output INTERMEDIATE terminal for connecting a measuring instrument used in alignment. PCB B Fig. 8.2 shows the layout of
  • Page 237B–70115EN/03 8. UNIT CONFIGURATION 8.3 Fig. 8.3 (a) shows installation, and Fig. 8.3 (b) shows piping of the pressure controller respectively. The functions of each of the components PRESSURE shown in the figures are outlined below: CONTROL UNIT (1) Pressure control valve This valve is provided to m
  • Page 2388. UNIT CONFIGURATION B–70115EN/03 Fig. 8.3 (a) Pressure control unit layout 236
  • Page 239B–70115EN/03 8. UNIT CONFIGURATION Fig. 8.3 (b) Block diagram of gas pressure control unit 237
  • Page 2409. SETTING AND ADJUSTMENT B–70115EN/03 9 SETTING AND ADJUSTMENT 238
  • Page 241B–70115EN/03 9. SETTING AND ADJUSTMENT 9.1 This unit is precisely adjusted at the factory and should not require any further adjustment. If the power supply unit, matching box, or discharge LASER POWER tube is replaced, however, the unit should be set and adjusted as described SUPPLY UNIT below. Whe
  • Page 2429. SETTING AND ADJUSTMENT B–70115EN/03 Enhanced pulse setting disable Parameter No. 15213: 32000 4) C2000C Output compensation disable Bit 4 of parameter No. 15000, parameter No. 15201 (bit 4 of parameter No. 200, parameter No. 231, No. 232): 0 Laser power feedback disable Parameter No. 15208 (param
  • Page 243B–70115EN/03 9. SETTING AND ADJUSTMENT 7) C6000B Output compensation disable Bit 4 of parameter No. 15000, parameter No. 15201 (bit 4 of parameter No. 200, parameter No. 231, No. 232): 0 Laser power feedback disable Parameter No. 15208 (parameter No. 233): 0 Maximum output command setting Parameter
  • Page 2449. SETTING AND ADJUSTMENT B–70115EN/03 9.1.2.3 (1) Start the oscillator, and wait 10 minutes in the LRDY state. Then set C3000C (step 1) HV ON and wait until the gas pressure is stabilized in the base discharge state. (Wait about 3 minutes. See DGN 905 [16–L, 16i–L] or DGN 860 [0–L].) Check that all
  • Page 245B–70115EN/03 9. SETTING AND ADJUSTMENT ÑÑÑ ÌÌÌÌÌÌÌ ÏÏ ÎÎÎÎ ÎÎÎÎ ÏÏÏ ÌÌÌÌÌÌ ÓÓÓ ÌÌÌÌÌÌÌ ÏÏ ÎÎÎÎ ÎÎÎÎ ÏÏÏ ÌÌÌÌÌÌ ÓÓÓ ÌÌÌÌÌÌÌ ÌÌÌÌÌÌ Power supplies 1, 2, 3, Power supplies 4, 5, 6, 7, 8, and 9 10, 11, and 12 Fig. 9.1.2.5 Base discharge adjustment points (indicated by arrows) (3) Check that the laser ou
  • Page 2469. SETTING AND ADJUSTMENT B–70115EN/03 9.1.2.6 (1) Start the oscillator, and wait until the gas pressure is stabilized in the C1500B (with a trigger base discharge state. (Wait about 3 minutes. See DGN 905 [16–L, 16i–L] or DGN 860 [0–L].) Then, check that all discharge tubes are electrode), C2000C,
  • Page 247B–70115EN/03 9. SETTING AND ADJUSTMENT Fig. 9.1.2.7 (a) Laser power supply unit layout (6 kW PSU) Fig. 9.1.2.7 (b) Adjust trimmer position (6 kW PSU) 245
  • Page 2489. SETTING AND ADJUSTMENT B–70115EN/03 Fig. 9.1.2.7 (c) Adjust trimmer position (9 kW PSU) 9.1.3 (1) Specify the output of a half of the rated output value, and turn on the beam. While checking that the power supply output (Note 4) does not Maximum Output exceed the maximum power supply output (Note
  • Page 249B–70115EN/03 9. SETTING AND ADJUSTMENT 9.1.5 (1) With the C2000B and C2000C, specify a pulse test command in the Pulse Output Test table of parameter No. 15207 and No. 15210. (2) Output the pulse test command specified in the table by 5 Hz and 5% for a pulse test time, and check that no alarm is iss
  • Page 2509. SETTING AND ADJUSTMENT B–70115EN/03 NOTE 4 Settings for each oscillator C1500B C2000B C3000C C3000C C6000B C6000B without a trigger (No.1, 4 PSU) (No.2, 3 PSU) (No. 1, 4, 5, 8 No. 2, 3, 6, 7 electrode PSU) PSU) S2 setting B201 B202 B201 B202 B202 B201 S5 setting SHORT SHORT SHORT SHORT USUAL SHOR
  • Page 251B–70115EN/03 9. SETTING AND ADJUSTMENT 9.1.7 Alarm level setting value of laser PSU is shown the following table. Alarm Level of Laser PSU Table 9.1.7 (a) Alarm level setting value Specification of laser PSU B204 B205 B206 B207 B208 B209 B210 DCI1 DC peak over 100A 100A (100A) 120A 120A 120A 120A cu
  • Page 2529. SETTING AND ADJUSTMENT B–70115EN/03 Table 9.1.7 (b) Specification of PSU Number of laser PSU No. 1 No. 2 No. 3 No. 4 No. 5 No. 6 No. 7 No. 8 C1500B B209 B209 — — — — — — (B207) (B207) (B204) (B204) C2000B B208 B208 B208 B208 — — — — (B205) (B205) (B205) (B205) C2000C B209 B209 (B207) (B207) C3000
  • Page 253B–70115EN/03 9. SETTING AND ADJUSTMENT 9.2 These PCBs are precisely adjusted at the factory and should not require any further adjustment. If the turbo blower or turbo PCB is replaced, TURBO PCB however, VR1 to VR4 should be adjusted and set oil level sensor as described below. Turbo PCB: A16B–1600–
  • Page 2549. SETTING AND ADJUSTMENT B–70115EN/03 Adjustment position C1500B : VR1 only C2000B : VR1 only C2000C : VR1 only C3000C : VR1 VR2 only C3000D : VR1 only C4000A : VR1 only C6000B : VR1 to VR4 Fig. 9.2 (a) Detail of turbo PCB (A16B–1600–0670) 252
  • Page 255B–70115EN/03 9. SETTING AND ADJUSTMENT VL4 Terminal VL2 Terminal VL3 Terminal VL1 Terminal VR3 VR1 VR4 VR2 VA4 Terminal VA3 Terminal Upper Base mounting VA1 Terminal face VA2 Terminal 0V (GND) Fig. 9.2 (b) Turbo PCB (A16B–1600–0770) details 253
  • Page 2569. SETTING AND ADJUSTMENT B–70115EN/03 9.3 The inverter is precisely adjusted at the factory and should not require any further adjustment. If it is replaced, however, the high–frequency inverter HIGH–FREQUENCY should be set and adjusted as described below. INVERTER The type of the high–frequency in
  • Page 257B–70115EN/03 9. SETTING AND ADJUSTMENT (7) Adjust the acceleration/deceleration period. Adjust the period from when the turbo blower starts rotating until the rotation stabilizes, and the period from when deceleration starts until the turbo blower stops. Setting the acceleration 1) While the inverte
  • Page 2589. SETTING AND ADJUSTMENT B–70115EN/03 Selection of T1 or T10 of the DS1 switch determines the factor of the acceleration or deceleration time. When T10 is selected, the time is multiplied by 10. TX1: 3 to 15 sec TX10: 15 to 150 sec. DR ON DS2 OFF F.OS F60 F.FIN ON DB DS1 ACCEL DECEL T.BST F.STP D.B
  • Page 259B–70115EN/03 9. SETTING AND ADJUSTMENT 9.3.2 (1) Connection Adjusting the Inverter The following cables are connected to the inverter: R. S. T: Three–phase power supply (A90L–0001–0464/CE U. V. W: Turbo blower power supply and 0465/CE: Model H, O, L: Frequency command Name: JH300) 1: Reset signal 2:
  • Page 2609. SETTING AND ADJUSTMENT B–70115EN/03 D Frequency setting, multi–speed setting or other frequency displays, motor rotational speed display, frequency conversion display, or output current display. NOTE When conflicting data is set, a warning WARN.... will be displayed. For 6 seconds thereafter, do
  • Page 261B–70115EN/03 9. SETTING AND ADJUSTMENT D MONITOR/FUNCTION The operator has two modes; MONITOR mode and FUNCTION mode. mode In the MONITOR mode, the monitor screen to display operation status appears. In the function mode, the function screen appears. The function screen has a hierarchical structure
  • Page 2629. SETTING AND ADJUSTMENT B–70115EN/03  Frequency command Displays the current frequency command status. Operation mode Display Remote operator Terminal Optional PCB 1 Optional PCB 2 Monitor/function mode FR FT F1 F2 D Monitor screen display “MONITOR” key ST Monitor 29 OR FR  " FS 0.00 Hz 0.00Hz S
  • Page 263B–70115EN/03 9. SETTING AND ADJUSTMENT D Function screen display “FUNCTION” key ST Monitor 29 OR FR " 1 Command " 2 Initial " Function mode menu screen 3 Function " (Function mode 1st layer) 4 Option "   Next layer mark This mark indicates that there is one more layer to display. To go to the next
  • Page 2649. SETTING AND ADJUSTMENT B–70115EN/03 (3) Parameter settings The following table lists the parameters for which the values have been changed from the initial values. If the inverter has been shipped alone from FANUC, the user must change the parameters as listed below. To change the parameters, an
  • Page 265B–70115EN/03 9. SETTING AND ADJUSTMENT 415 "1 440 220 "1 250 Monitor (LED display) POWER Lamp This display shows frequen- Power lamp of cy, motor current, motor revo- control circuit lution speed, and trip history Up key, Down key These keys are used to change data and increase or decrease the frequ
  • Page 2669. SETTING AND ADJUSTMENT B–70115EN/03 9.4 This unit is precisely adjusted at the factory and should not require any further adjustment. If the pressure controller is replaced or requires PRESSURE re–adjustment, however, it should be set and adjusted as described below: CONTROL UNIT 9.4.1 (1) Turn t
  • Page 267B–70115EN/03 9. SETTING AND ADJUSTMENT PRESSURE ATMOSPHERIC SENSOR PRESSURE SWITCH LASER GAS PRESSURE SWITCH Fig. 9.4.2 Pressure control unit sensor layout 265
  • Page 2689. SETTING AND ADJUSTMENT B–70115EN/03 9.5 This unit is precisely adjusted at the factory and should not require any further adjustment. If the exhaust adjustment valve is accidentally ADJUSTING THE touched or if the exhaust controller is replaced, however, the gas flow EXHAUST CONTROL should be che
  • Page 269B–70115EN/03 9. SETTING AND ADJUSTMENT 9.6 This coefficient is precisely adjusted at the factory and should not require any further adjustment. If the rear mirror of the laser oscillator or the SETTING THE power sensor unit is replaced, however, the power input compensation POWER INPUT coefficient s
  • Page 2709. SETTING AND ADJUSTMENT B–70115EN/03 9.7 This sensor is precisely adjusted at the factory and should not require any further adjustment. If the water distribution unit or water flow sensor is WATER FLOW replaced, however, this sensor should be set and adjusted as described SENSOR below: 9.7.1 (1)
  • Page 271B–70115EN/03 9. SETTING AND ADJUSTMENT (10) Gradually reduce the flow rate of the water supply. Check the rate at which the switch trips off. Then, gradually increase the flow rate. If the alarm flow rate is within the following range, the sensor is normal. If the alarm range is exceeded, repeat ste
  • Page 2729. SETTING AND ADJUSTMENT B–70115EN/03 9.7.2 (1) Adjust the flow rate of cooling water flowing into the oscillator to an Adjusting the Flow alarm setting flow rate. Use a flowmeter with a proper and accurate rated flow rate. Sensor of the C2000C, C3000D, C4000A, and C6000B Model Alarm setting flow r
  • Page 273B–70115EN/03 9. SETTING AND ADJUSTMENT 9.8 If the laser oscillator is not used for a long time (one week or more) or if the laser gas circulation system is opened to the atmosphere (when a DISCHARGE AGING mirror is cleaned or when a component of the gas system is replaced, for example), aging must b
  • Page 2749. SETTING AND ADJUSTMENT B–70115EN/03 D Manual operation This method can be used if the machine operator’s panel has a switch for starting internal discharge manually. 1) Enter the desired output and duty cycle on the setting screen. 2) Press the internal discharge switch to start internal discharg
  • Page 275B–70115EN/03 9. SETTING AND ADJUSTMENT Fig. 9.8 (a) Detail of the Cleaner Flange 2) Mount the cleaner flange on the oscillator. Be sure to keep the flange in the correct orientation. Figs. 9.8 (b) to 9.8 (h) show the locations where the cleaner flange is to be fastened. Fig. 9.8 (b) Inlet of cleaner
  • Page 2769. SETTING AND ADJUSTMENT B–70115EN/03 Fig. 9.8 (c) Inlet of cleaner flange in C2000B Fig. 9.8 (d) Inlet of cleaner flange in C2000C 274
  • Page 277B–70115EN/03 9. SETTING AND ADJUSTMENT Fig. 9.8 (e) Inlet of cleaner flange in C3000C Fig. 9.8 (f) Inlet of cleaner flange in C3000D 275
  • Page 2789. SETTING AND ADJUSTMENT B–70115EN/03 Fig. 9.8 (g) Inlet of cleaner flange in C4000A Fig. 9.8 (h) Inlet of cleaner flange in C6000B 3) Start the oscillator, and check it for leakage. Vacuum it twice. 276
  • Page 279B–70115EN/03 9. SETTING AND ADJUSTMENT 4) Start the oscillator, and keep the turbo blower rotating (LRDY). Leave the oscillator in this state overnight. 5) More impurities can be captured by using also discharge aging to raise the gas temperature. 6) When gas flow system aging is completed, stop and
  • Page 28010. REPLACEMENT PROCEDURES B–70115EN/03 10 REPLACEMENT PROCEDURES 278
  • Page 281B–70115EN/03 10. REPLACEMENT PROCEDURES 10.1 INPUT UNIT 10.1.1 Replace the stabilized power supply as follows: Replacing the (1) Turn off the power to the CNC, then turn off the power to the laser Stabilized Power oscillator. In addition, open the main circuit breaker for the laser oscillator. Suppl
  • Page 28210. REPLACEMENT PROCEDURES B–70115EN/03 10.1.4 Replace the FS16–L interface PCBs on the oscillator side as follows: Replacing the FS16–L, When IF PCB (A02B–0128–C202) FS16i–L Interface (1) Replacing the upper PCB (A16B–1110–0260) PCBs on the Oscillator 1) Turn off the power to the CNC, then turn off
  • Page 283B–70115EN/03 10. REPLACEMENT PROCEDURES A20B–1005–0124 Fig. 10.1.4 (a) Removing the IF PCB unit (FS16–L: A02B–0128–C202) Fig. 10.1.4 (b) Removing the PCB from the PCB holder 281
  • Page 28410. REPLACEMENT PROCEDURES B–70115EN/03 10.2 Figs. 10.2 (a) to (l) show the laser power supply. Replace the laser power supply as described below. REPLACING THE (1) Replacing the power supply LASER POWER SUPPLY 1) Turn off the power to the laser oscillator, then drain the cooling water. 2) Remove th
  • Page 285B–70115EN/03 10. REPLACEMENT PROCEDURES 2. Remove the damaged diode by removing the screws and nuts at the both ends. In case of 9 kW power supply at first replace the cooling heat sink and diode plate 1 and 2, then replace the diode block A and B to remove diode. CAUTION When removing a diode, if i
  • Page 28610. REPLACEMENT PROCEDURES B–70115EN/03 3. Mount a new FET module PCB, fix it using the six screws, then connect the cables. When the 9–kW power supply is being used, connect the CN51 or CN52 cable to the new FET PCB securely, then temporarily tighten all the screws so that the FET PCB is free to mo
  • Page 287B–70115EN/03 10. REPLACEMENT PROCEDURES Fig. 10.2 (a) Laser power supply unit layout (front side): B204, B205 Fig. 10.2 (b) Laser power supply unit layout (upside): B204, B205 285
  • Page 28810. REPLACEMENT PROCEDURES B–70115EN/03 Fig. 10.2 (c) Laser power unit layout (inner side): B204, B205 Fig. 10.2 (d) Laser power unit layout (inner part details): B204, B205 286
  • Page 289B–70115EN/03 10. REPLACEMENT PROCEDURES Fig. 10.2 (e) Diode unit layout (Fig. 10.2 (d) B part details): B204, B205 Fig. 10.2 (f) Diode unit layout (Fig. 10.2 (d) C part details): B204, B205 287
  • Page 29010. REPLACEMENT PROCEDURES B–70115EN/03 Fig. 10.2 (g) FET module PCB layout (Fig. 10.2 (d) A part details): B204, B205 Cover mounting screw Cover for XT22 Fig. 10.2 (h) Layser PSU layout: B206 to B210 288
  • Page 291B–70115EN/03 10. REPLACEMENT PROCEDURES Step up transformer PCB Diod unit 2 Diod unit 1 Fig. 10.2 (i) Laser PSU internal details: B206 to B208 289
  • Page 29210. REPLACEMENT PROCEDURES B–70115EN/03 F type Cathod Anode R type Anode Cathod Fig. 10.2 (j) Mounting position of diode: B206 to B208 290
  • Page 293B–70115EN/03 10. REPLACEMENT PROCEDURES Cooling heat sink Diode plate 2 Diode plate 1 Diode block A Diode block B Fiber reinforced plastic Diode block face of A Fiber reinforced plastic Diode block face of B Fig. 10.2 (k) Replacing diode: B206 to B208 Fig. 10.2 (l) FET PCB heat sink fixing: B206 to
  • Page 29410. REPLACEMENT PROCEDURES B–70115EN/03 Fig. 10.2 (m) Laser PSU internal details: B209 to B210 292
  • Page 295B–70115EN/03 10. REPLACEMENT PROCEDURES Fig. 10.2 (n) Mounting position of diode: B209 to B210 293
  • Page 29610. REPLACEMENT PROCEDURES B–70115EN/03 10.3 Replace the matching box as follows: REPLACING THE (1) Turn off the power to the CNC, then turn off the power to the laser oscillator. In addition, open the main circuit breaker for the laser MATCHING BOX oscillator. (2) Disconnect the power and signal ca
  • Page 297B–70115EN/03 10. REPLACEMENT PROCEDURES 10.4 When the turbo blower is replaced, the gas circulating system is open to the atmosphere for a long time. Pay particular attention to the immediate REPLACING THE surroundings to ensure that dust and other contaminants do not enter the TURBO BLOWER gas circ
  • Page 29810. REPLACEMENT PROCEDURES B–70115EN/03 7) Tighten the nut of the damping rubber. Carefully follow the procedure below to prevent the damping rubber from being twisted and damaged. Tightening procedure (C1500B, C2000B, C2000C, C3000C, C6000B) 1. Position the antivibration rubber such that its partin
  • Page 299B–70115EN/03 10. REPLACEMENT PROCEDURES Fig. 10.4 Turbo blower layout 297
  • Page 30010. REPLACEMENT PROCEDURES B–70115EN/03 10.5 Replace the turbo PCB as follows: REPLACING THE (1) Turn off the power to the CNC, then turn off the power to the laser oscillator. In addition, open the main circuit breaker for the laser TURBO PCB oscillator. (2) Disconnect all cables from the turbo PCB
  • Page 301B–70115EN/03 10. REPLACEMENT PROCEDURES 10.7 When the exhaust pump is replaced, the gas circulating system is open to the atmosphere for a long time. Pay particular attention to the immediate REPLACING THE surroundings to ensure that dust and other contaminants do not enter the EXHAUST PUMP gas circ
  • Page 30210. REPLACEMENT PROCEDURES B–70115EN/03 Fig. 10.7 Exhaust pump unit layout 300
  • Page 303B–70115EN/03 10. REPLACEMENT PROCEDURES 10.8 When the pressure control unit is replaced, the gas circulating system is open to the atmosphere for a long time. Pay particular attention to the REPLACING THE immediate surroundings to ensure that dust and other contaminants do not PRESSURE enter the gas
  • Page 30410. REPLACEMENT PROCEDURES B–70115EN/03 10.9 When the exhaust control unit is replaced, the gas circulating system is open to the atmosphere for a long time. Pay particular attention to the REPLACING THE immediate surroundings to ensure that dust and other contaminants do not EXHAUST CONTROL enter t
  • Page 305B–70115EN/03 10. REPLACEMENT PROCEDURES Fig. 10.9 (b) Exhaust control unit C2000B, C2000C, C3000D, C4000A Fig. 10.9 (c) Exhaust control unit C3000C 303
  • Page 30610. REPLACEMENT PROCEDURES B–70115EN/03 Fig. 10.9 (d) Exhaust control unit C6000B 304
  • Page 307B–70115EN/03 10. REPLACEMENT PROCEDURES 10.10 When a discharge tube is replaced, the gas circulating system is open to the atmosphere for a long time. Pay particular attention to the immediate REPLACING A surroundings to ensure that dust and other contaminants do not enter the DISCHARGE TUBE gas cir
  • Page 30810. REPLACEMENT PROCEDURES B–70115EN/03 10.11 The laser oscillator contains many fan units, which are classified into the following two types: REPLACING A FAN (1) Fan unit UNIT Consists of several fans and a terminal block. (2) Fan–assisted radiator Consists of a water–cooled radiator, several fans,
  • Page 309B–70115EN/03 10. REPLACEMENT PROCEDURES 10.12 The power sensor is a very delicate component. Be careful not to touch or apply force to the black, light–sensitive surface. Also, ensure that no REPLACING THE dust enters the sensor. POWER SENSOR UNIT When removing the power sensor unit from the rear mi
  • Page 31010. REPLACEMENT PROCEDURES B–70115EN/03 10.13 Replace the shutter section as follows: REPLACING THE SHUTTER SECTION 10.13.1 (1) Turn off the power to the CNC, then turn off the power to the laser Replacing the Shutter oscillator. In addition, open the main circuit breaker for the laser oscillator. U
  • Page 311B–70115EN/03 10. REPLACEMENT PROCEDURES Fig. 10.13.3 (a) C1500B, C2000B, C2000C, C3000C, C3000D, and C4000A shutter unit layout 309
  • Page 31210. REPLACEMENT PROCEDURES B–70115EN/03 Fig. 10.13.3 (b) Shutter unit layout 310
  • Page 313B–70115EN/03 10. REPLACEMENT PROCEDURES 10.14 Replace the beam absorber as follows: REPLACING THE (1) Turn off the power to the CNC, then turn off the power to the laser oscillator. In addition, open the main circuit breaker for the laser BEAM ABSORBER oscillator. (2) The beam absorber is water–cool
  • Page 31410. REPLACEMENT PROCEDURES B–70115EN/03 Fig. 10.14 (a) Beam absorber layout (C1500B, C2000B, C2000C) 3 Fig. 10.14 (b) Beam absorber layout (C3000C, C3000D) 312
  • Page 315B–70115EN/03 10. REPLACEMENT PROCEDURES POSITION ADJUSTMENT SCREW THERMAL SW Fig. 10.14 (c) Beam absorber layout (C4000A) 313
  • Page 31610. REPLACEMENT PROCEDURES B–70115EN/03 Fig. 10.14 (d) Beam absorber layout (C6000B) 314
  • Page 317B–70115EN/03 10. REPLACEMENT PROCEDURES 10.15 Replace the high–frequency inverter as follows: REPLACING THE (1) Turn off the power to the CNC, then turn off the power to the laser oscillator. In addition, open the main circuit breaker for the laser HIGH–FREQUENCY oscillator. INVERTER (2) Disconnect
  • Page 31810. REPLACEMENT PROCEDURES B–70115EN/03 10.16 Replace the water distribution unit as follows: REPLACING THE (1) Turn off the power to the CNC, then turn off the power to the laser oscillator. In addition, open the main circuit breaker for the laser WATER oscillator. DISTRIBUTION UNIT (2) Drain all c
  • Page 319B–70115EN/03 10. REPLACEMENT PROCEDURES Fig. 10.16 (a) Detail of water destributer unit (C1500B) Refer to water flow diagram (Fig. 7.2 (a)). 317
  • Page 32010. REPLACEMENT PROCEDURES B–70115EN/03 Fig. 10.16 (b) Detail of water destributer unit (C2000B) Refer to water flow diagram (Fig. 7.2 (b)). 318
  • Page 321B–70115EN/03 10. REPLACEMENT PROCEDURES Fig. 10.16 (c) Detail of water destributer unit (C2000C) Refer to water flow diagram (Fig. 7.2 (c)). 319
  • Page 32210. REPLACEMENT PROCEDURES B–70115EN/03 Fig. 10.16 (d) Detail of water destributer unit (C3000C) Refer to water flow diagram (Fig. 7.2 (d)). 320
  • Page 323B–70115EN/03 10. REPLACEMENT PROCEDURES Valve (closed) Valve (open) Position when water is removed Normal position Fig. 10.16 (e) Detail of water destributer unit (C3000D) Refer to water flow diagram (Fig. 7.2 (e)). 321
  • Page 32410. REPLACEMENT PROCEDURES B–70115EN/03 Valve (closed) Valve (open) Position when water is removed Normal position Fig. 10.16 (f) Detail of water destributer unit (C4000A) Refer to water flow diagram (Fig. 7.2 (f)). 322
  • Page 325B–70115EN/03 10. REPLACEMENT PROCEDURES Fig. 10.16 (g) Detail of distribution unit A (C6000B) Refer to water flow diagram. 323
  • Page 32610. REPLACEMENT PROCEDURES B–70115EN/03 Fig. 10.16 (h) Detail of distribution unit B (C6000B) Refer to water flow diagram. 324
  • Page 327B–70115EN/03 10. REPLACEMENT PROCEDURES 10.17 Replace the flow sensor as follows: REPLACING THE (1) Turn off the power to the CNC, then turn off the power to the laser oscillator. In addition, open the main circuit breaker for the laser FLOW SENSOR oscillator. (2) Drain all cooling water from the os
  • Page 32810. REPLACEMENT PROCEDURES B–70115EN/03 Fig. 10.17 (b) Detail of flow sensor (C2000C, C3000D, C4000A, C6000B) 326
  • Page 329B–70115EN/03 10. REPLACEMENT PROCEDURES 10.18 Replace the Dew sensor as follows: REPLACING THE (1) Turn off the power to the CNC, then turn off the power to the laser oscillator. In addition, open the main circuit breaker for the laser DEW SENSOR oscillator. (2) Disconnect the dew sensor Faston term
  • Page 33010. REPLACEMENT PROCEDURES B–70115EN/03 10.20 Use the procedure below for trigger electrode replacement. REPLACING THE (1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply. TRIGGER (2) Remove bolt  and screw , then remove the trigger electrode. ELECTRODE (3) C
  • Page 331B–70115EN/03 10. REPLACEMENT PROCEDURES        Trigger electrode  Feeder  Feeder mounting screw  Trigger electrode mounting screw  O–ring (P10)  Discharge tube nozzle A Fig. 10.20 Trigger electrode replacement 329
  • Page 33211. LASER OPTICAL SYSTEM B–70115EN/03 11 LASER OPTICAL SYSTEM Table 11 lists the optical parts and their features. Use this table to determine the feature of each optical part. When mounting these parts, be careful to orient them correctly and ensure that they are being mounted on compatible units.
  • Page 333B–70115EN/03 11. LASER OPTICAL SYSTEM 11.1 The optical parts in the laser oscillator, including the output mirror, rear mirror, folding mirrors, and circular polarization mirror, must be cleaned CLEANING OPTICAL or replaced periodically. Similarly, if the laser output or beam mode PARTS pattern beco
  • Page 33411. LASER OPTICAL SYSTEM B–70115EN/03 Fig. 11.1 (a) Structure of diagram output coupler (C1500B, C2000B, C2000C) 332
  • Page 335B–70115EN/03 11. LASER OPTICAL SYSTEM Fig. 11.1 (b) Structure of diagram rear mirror (C1500B, C2000B, C2000C) 333
  • Page 33611. LASER OPTICAL SYSTEM B–70115EN/03 Fig. 11.1 (c) Structure of diagram output coupler (C3000C, C3000D, C4000A, C6000B) 334
  • Page 337B–70115EN/03 11. LASER OPTICAL SYSTEM Fig. 11.1 (d) Structure of diagram rear mirror (C3000C, C3000D, C4000A, C6000B) 335
  • Page 33811. LASER OPTICAL SYSTEM B–70115EN/03 11.1.1 To clean the output coupler, follow the procedure given below. Since it Cleaning and is necessary to touch the optical parts and vacuum parts while cleaning the output coupler, wear clean gloves or finger cots. Do not touch these Replacing the Output part
  • Page 339B–70115EN/03 11. LASER OPTICAL SYSTEM Fig. 11.1.1 (a) Cleaning mirror 1 Fig. 11.1.1 (b) Cleaning mirror 2 Fig. 11.1.1 (c) Cleaning mirror 3 337
  • Page 34011. LASER OPTICAL SYSTEM B–70115EN/03 Fig. 11.1.1 (d) Schematic diagram of mounting of output coupler/ rear mirror to the holder 338
  • Page 341B–70115EN/03 11. LASER OPTICAL SYSTEM (8) Move the lens cleaning paper horizontally to and fro across the mirror. NOTE Since the lens cleaner has a high surface tension, it may be difficult to move the cleaning paper. As the paper is slowly moved to and fro across the mirror, however, the ethyl alco
  • Page 34211. LASER OPTICAL SYSTEM B–70115EN/03 11.1.2 To clean the rear mirror, follow the procedure given below. Since it is Cleaning and necessary to touch optical parts and vacuum parts while cleaning the rear mirror, wear clean gloves or finger cots. Do not touch these parts directly Replacing the Rear w
  • Page 343B–70115EN/03 11. LASER OPTICAL SYSTEM NOTE Since the lens cleaner has a high surface tension, it may be difficult to move the cleaning paper. As the paper is slowly moved to and fro across the mirror, however, the ethyl alcohol will gradually evaporate. (9) Blow clean air (using, for example, a came
  • Page 34411. LASER OPTICAL SYSTEM B–70115EN/03 11.1.3 To clean the folding mirrors, follow the procedure given below. Since it Cleaning and is necessary to touch the optical parts and vacuum parts while cleaning the folding mirrors, wear clean gloves or finger cots. Do not touch these Replacing the Folding p
  • Page 345B–70115EN/03 11. LASER OPTICAL SYSTEM (11) When replacing a mirror, remove the mirror from its holder. Since vacuum grease is applied to the rear of the mirror, insert a tool such as a standard screwdriver into the slot on the side plane of the mirror mounting section, and pry out the mirror. Be car
  • Page 34611. LASER OPTICAL SYSTEM B–70115EN/03 FOLDING MIRROR UNIT FOLDING MIRROR O–RING (G55) MIRROR HOLDER MIRROR HOLDER ATTACHMENT SCREW Fig. 11.1.3 (a) Structure diagram of folding mirror unit 344
  • Page 347B–70115EN/03 11. LASER OPTICAL SYSTEM FOLDING MIRROR UNIT FOLDING MIRROR O–RING (G65) MIRROR HOLDER MIRROR HOLDER ATTACHMENT SCREW Fig. 11.1.3 (b) Structure diagram of folding mirror unit: C6000B 11.1.4 The zero–shift mirror and circular polarization mirror are used in the optical path length unit,
  • Page 34811. LASER OPTICAL SYSTEM B–70115EN/03 [Procedure] (1) Turn off the power to the CNC, then open the main circuit breaker or turn off the power supply of the laser oscillator. (2) Remove the mirror holder from the block (alignment unit) by loosening the mirror holder mounting screw. (3) Remove the mir
  • Page 349B–70115EN/03 11. LASER OPTICAL SYSTEM 11.2 OPTICAL AXIS ADJUSTMENT 11.2.1 The internal surfaces of the output mirror and rear mirror are concave. For Alignment of the laser oscillation, the curvature centers and mirror surfaces of the two mirrors must lie on the same axis. When this axis matches the
  • Page 35011. LASER OPTICAL SYSTEM B–70115EN/03 4) Obtain a maximum power based on the folding mirror (FM1) by using the folding mirror (FM4) as the reference. 5) Collect a burn pattern. If the mode is good, end this procedure. If not, start all over again from step 1). At this time, collect a burn pattern in
  • Page 351B–70115EN/03 11. LASER OPTICAL SYSTEM 5) Collect a burn pattern. If the mode is good, end this procedure. If not, start all over again from step 1). At this time, collect a burn pattern in each step. If the mode is finally good, end this procedure. ÌÌ ÑÑ ÌÌ Î FM5 FM4 FM6 ÑÑÓ Î Ó R.M. ÌÌ ÓÓ Ó ÌÌ FM2
  • Page 35211. LASER OPTICAL SYSTEM B–70115EN/03 5) Obtain a maximum power based on O.C. by using R.M. as the reference. Then, repeat this procedure starting with step 2). At this time, collect a burn pattern in each step. If the mode is finally good, end this procedure. (5) C4000A 1) Obtain a maximum power ba
  • Page 353B–70115EN/03 11. LASER OPTICAL SYSTEM 11.2.1.4 (1) Minimize the output power of internal discharge. If a large output is Obtaining a maximum used, the mode present when a maximum power is obtained is not always the best mode due to thermal distortion of each mirror. power However, a capability of de
  • Page 35411. LASER OPTICAL SYSTEM B–70115EN/03 11.2.1.5 (1) For information about burn pattern collection, see Section 4.3(1). Burn pattern collection (2) In the automatic operation mode, execute the program below to emit and beam mode a laser beam to an acrylic block. evaluation [Example of program: For the
  • Page 355B–70115EN/03 11. LASER OPTICAL SYSTEM Do not determine the maximum power position of A at the actual maximum power point (peak point). Instead, find the first position 1’ with the same power after a peak, and set a position halfway between 1 and 1’. Adjust B to obtain a maximum power at that positio
  • Page 35611. LASER OPTICAL SYSTEM B–70115EN/03 BEAM PATH (SHORT PATH TIME) ADJUSTMENT SCREW OF ADJUSTMENT SCREW OF ALIGNMENT (N: Y AXIS) ALIGNMENT (N: Y AXIS) REAR MIRROR SIDE (R.M.) OUTPUT COUPLER SIDE (O.C.) ADJUSTMENT SCREW OF ADJUSTMENT SCREW OF ALIGNMENT (M: X AXIS) ALIGNMENT (M: X AXIS) ADJUSTMENT SCRE
  • Page 357B–70115EN/03 11. LASER OPTICAL SYSTEM BEAM PATH (SHORT PATH TIME) ADJUSTMENT SCREW OF ADJUSTMENT SCREW OF ALIGNMENT (N: Y AXIS) ALIGNMENT (N: Y AXIS) REAR MIRROR SIDE (R.M.) OUTPUT COUPLER SIDE (O.C.) ADJUSTMENT SCREW OF ADJUSTMENT SCREW OF ALIGNMENT (M: X AXIS) ALIGNMENT (M: X AXIS) ADJUSTMENT SCRE
  • Page 35811. LASER OPTICAL SYSTEM B–70115EN/03 ADJUSTMENT SCREW OF FOLDING MIRROR SIDE (FM3) ALIGNMENT (n: Y AXIS) FOLDING MIRROR SIDE (FM4) OUTPUT COUPLER SIDE (O.C.) ADJUSTMENT SCREW OF ALIGNMENT (M: X AXIS) ADJUSTMENT SCREW OF ALIGNMENT (N: Y AXIS) ADJUSTMENT SCREW OF ALIGNMENT (m: X AXIS) BEAM PATH (SHOR
  • Page 359B–70115EN/03 11. LASER OPTICAL SYSTEM ADJUSTMENT SCREW OF FOLDING MIRROR SIDE (FM3) ALIGNMENT (n: Y AXIS) FOLDING MIRROR SIDE (FM4) OUTPUT COUPLER SIDE (O.C.) ADJUSTMENT SCREW OF ALIGNMENT (M: X AXIS) ADJUSTMENT SCREW OF ALIGNMENT (N: Y AXIS) ADJUSTMENT SCREW OF ALIGNMENT (m: X AXIS) BEAM PATH (SHOR
  • Page 36011. LASER OPTICAL SYSTEM B–70115EN/03 ADJUSTMENT SCREW OF ADJUSTMENT SCREW OF ALIGNMENT (N: Y AXIS) ALIGNMENT (m: X AXIS) FOLDING MIRROR SIDE (FM4) ADJUSTMENT SCREW OF ALIGNMENT (n: Y AXIS) REAR MIRROR ADJUSTMENT SCREW OF SIDE (R.M.) ALIGNMENT (M: X AXIS) OUTPUT COUPLER SIDE (O.C.) FOLDING MIRROR SI
  • Page 361B–70115EN/03 11. LASER OPTICAL SYSTEM ADJUSTMENT SCREW OF FOLDING MIRROR SIDE (FM3) ALIGNMENT (n: Y AXIS) OUTPUT COUPLER FOLDING MIRROR SIDE (FM4) SIDE (O.C.) ADJUSTMENT SCREW OF ALIGNMENT (M: X AXIS) ADJUSTMENT SCREW OF ADJUSTMENT SCREW OF ALIGNMENT (N: Y AXIS) ALIGNMENT (m: X AXIS) ADJUSTMENT SCRE
  • Page 36211. LASER OPTICAL SYSTEM B–70115EN/03 11.2.2 Alignment of the Laser Diode 11.2.2.1 (1) Attach an acrylic plate approximately 3 to 10 m from the outlet of the Adjusting the beam laser oscillator, and obtain a burn pattern for the CO2 laser beam (one shot, rated output, CW 100%, 0.1–second duration).
  • Page 363B–70115EN/03 11. LASER OPTICAL SYSTEM Fig. 11.2.2.2 Laser diode unit (A04B–0811–D401) 361
  • Page 36411. LASER OPTICAL SYSTEM B–70115EN/03 11.2.3 The oscillators of the short optical path types and the C3000C of long Alignment of the Beam optical path type contain a beam folding unit to divert the laser beam within the oscillator. If the beam output direction changes as a result of Folding Unit ali
  • Page 365B–70115EN/03 11. LASER OPTICAL SYSTEM Fig. 11.2.3 (a) Corner reflectors unit (C1500B, C2000B, C2000C) 363
  • Page 36611. LASER OPTICAL SYSTEM B–70115EN/03 Fig. 11.2.3 (b) Corner reflectors unit (C3000C, C3000D, C4000A, Short optical path length type) 364
  • Page 367B–70115EN/03 11. LASER OPTICAL SYSTEM Fig. 11.2.3 (c) Corner reflectors unit (C3000C, Long optical path length type) 365
  • Page 368APPENDI
  • Page 369B–70115EN/03 APPENDIX A. EXTERNAL VIEW A EXTERNAL VIEW 369
  • Page 370A. EXTERNAL VIEW APPENDIX B–70115EN/03 Fig. A (a) C1500B (short optical path length type) 370
  • Page 371B–70115EN/03 APPENDIX A. EXTERNAL VIEW Fig. A (b) C1500B (long optical path length type) 371
  • Page 372A. EXTERNAL VIEW APPENDIX B–70115EN/03 Fig. A (c) C2000B (short optical path length type) 372
  • Page 373B–70115EN/03 APPENDIX A. EXTERNAL VIEW Fig. A (d) C2000B (long optical path length type) 373
  • Page 374A. EXTERNAL VIEW APPENDIX B–70115EN/03 Fig. A (e) C2000C (short optical path length type) 374
  • Page 375B–70115EN/03 APPENDIX A. EXTERNAL VIEW Fig. A (f) C2000C (long optical path length type) 375
  • Page 376A. EXTERNAL VIEW APPENDIX B–70115EN/03 Fig. A (g) C3000C (short optical path length type, resonator section) 376
  • Page 377B–70115EN/03 APPENDIX A. EXTERNAL VIEW Fig. A (h) C3000C (Long optical path A type) 377
  • Page 378A. EXTERNAL VIEW APPENDIX B–70115EN/03 Fig. A (i) C3000C (Long optical path B type) 378
  • Page 379B–70115EN/03 APPENDIX A. EXTERNAL VIEW Fig. A (j) C3000C (auxiliary equipment section) 379
  • Page 380A. EXTERNAL VIEW APPENDIX B–70115EN/03 Fig. A (k) C3000D (short optical path length type) 380
  • Page 381B–70115EN/03 APPENDIX A. EXTERNAL VIEW Fig. A (l) C3000D (long optical path B type) 381
  • Page 382A. EXTERNAL VIEW APPENDIX B–70115EN/03 Fig. A (m) C4000A (short optical path length type) 382
  • Page 383B–70115EN/03 APPENDIX A. EXTERNAL VIEW Fig. A (n) C4000A (long optical path B type) 383
  • Page 384A. EXTERNAL VIEW APPENDIX B–70115EN/03 Fig. A (o) C6000B 384
  • Page 385B. FANUC LASER C SERIES B–70115EN/03 APPENDIX SPECIFICATIONS B FANUC LASER C SERIES SPECIFICATIONS 385
  • Page 386B. FANUC LASER C SERIES SPECIFICATIONS APPENDIX B–70115EN/03 C1500B C1500B C2000B C2000B C2000C C2000C Item (short (long (short (long (short (long optical path) optical path) optical path) optical path) optical path) optical path) Type C1500B C2000B C2000C Method High–speed axial carbon dioxide gas
  • Page 387B. FANUC LASER C SERIES B–70115EN/03 APPENDIX SPECIFICATIONS C3000C C3000C C3000D C3000D Item (short optical path) (long optical path) (short optical path) (long optical path) Type C3000C C3000D Method High–speed axial carbon dioxide gas laser using high–frequency discharge excitation Oscillator and
  • Page 388B. FANUC LASER C SERIES SPECIFICATIONS APPENDIX B–70115EN/03 C4000A C4000A Item C6000B (short optical path) (long optical path) Type C4000A C6000B Method High–speed axial carbon dioxide gas laser using high–frequency discharge excitation Structure Combination resonator/power supply type Rated laser
  • Page 389B–70115EN/03 APPENDIX C. ERROR CODE LIST C ERROR CODE LIST No. Contents Alarm level 16L 0L 4061 661 Anomaly in AD converter 1 ALARM 1 4062 662 Anomaly in AD converter 2 ALARM 1 4063 663 Anomaly in RF/DC power unit ALARM 2 4065 665 Anomaly in shutter action ALARM 2 4066 666 There exists discharge tub
  • Page 390C. ERROR CODE LIST APPENDIX B–70115EN/03 No. Contents Alarm level 16L 0L 4085 685 Decrease of laser output Warning can be reset 4087 687 Overheat in shutter mirror ALARM 2 4088 688 Decrease of discharge tube voltage ALARM 1 4089 689 Selection signal of assist gas not com- Shutter : close manded (in
  • Page 391B–70115EN/03 APPENDIX D. PARAMETERS D PARAMETERS This appendix describes the parameters related to sequence control inside the laser oscillator and laser cutting conditions for FS16–L, FS16i–L, and FS0–L. Many parameters are specific to one type of laser oscillator and one machine. So, the user shou
  • Page 392D. PARAMETERS APPENDIX B–70115EN/03 D.1 Parameter numbers starting from 15000 are used for the FS16–L or FS16i–L. Those starting from 0200 or 3900 are used for the FS0–L. PARAMETERS FOR ENABLING/ DISABLING VARIOUS FUNCTIONS No. Parameter description #7 #6 #5 #4 #3 #2 #1 #0 15000 FLT CLB BMO AGA LGC
  • Page 393B–70115EN/03 APPENDIX D. PARAMETERS LGC 1 : Two stage gain selection of intra–tube Pressure control valid (usually) 0 : Invalid (When this bit is 1, PRM No. 15245 [207] becomes valid.) When this bit is 1, different control gains are used in the pressure control in discharge start preparation complet
  • Page 394D. PARAMETERS APPENDIX B–70115EN/03 #7 #6 #5 #4 #3 #2 #1 #0 15002 PSH PCG ADC BMA 3979 C10M BMA GVW BMA 1 : Enables beam output with the shutter closed in the automatic operation mode (for maintenance). 0 : Disables beam output with the shutter closed in the automatic operation mode (standard). PCG
  • Page 395B–70115EN/03 APPENDIX D. PARAMETERS #7 #6 #5 #4 #3 #2 #1 #0 15004 CWY ECH EDG BMC SPB STC AGC AGC 1 : Controls machining pressure for the set time. 0: Uses a flow pattern. STC 1 : Controls the shutter with an external signal. 0: Controls the shutter with a G code. SPB 1 : Outputs no beam in skip ope
  • Page 396D. PARAMETERS APPENDIX B–70115EN/03 #7 #6 #5 #4 #3 #2 #1 #0 15006 PCL PIN TRM TRM 1 : Disables the start–point and end–point soft keys for the trace setting screen. 0 : Enables the start–point and end–point soft keys for the trace setting screen. PIN 1 : Specifies a G13 address using inch input. 0 :
  • Page 397B–70115EN/03 APPENDIX D. PARAMETERS #7 #6 #5 #4 #3 #2 #1 #0 15009 TEM BCG BEM AFZ BS2 BS1 AS2 AS1 This parameter is used for the laser gas mixing function to record and monitor the operating state of the mixer. This parameter is automatically set, so this parameter need not be set manually. AS2,AS1
  • Page 398D. PARAMETERS APPENDIX B–70115EN/03 D.2 PARAMETERS FOR DISCHARGE TUBE SELECTION #7 #6 #5 #4 #3 #2 #1 #0 15025 PS8 PS7 PS6 PS5 PS4 PS3 PS2 PS1 #7 #6 #5 #4 #3 #2 #1 #0 15026 PS16 PS15 PS14 PS13 PS12 PS11 PS10 PS9 PS1 – 16 Discharge tube selection when half of the discharge tubes are used [How to set]
  • Page 399B–70115EN/03 APPENDIX D. PARAMETERS D.3 PARAMETERS FOR CONTOURING CONDITIONS 15040 LPWR 0204 LPWR LPWR Power output setting for contour processing (cutting/welding) (Setting data) [Setting range] 0 to 7000 [Unit] WATT [How to set] This parameter can be set in laser setting screen and processing prog
  • Page 400D. PARAMETERS APPENDIX B–70115EN/03 D.4 PARAMETERS FOR EDGE MACHINING CONDITIONS 15050 EDANG EDANG Edge detection angle A corner is assumed to be present when the angle formed by two blocks is smaller than the specified angle. [Setting range] 0 to 180 [Unit] deg 15051 PCPWR PCPWR Peak piercing power
  • Page 401B–70115EN/03 APPENDIX D. PARAMETERS [Setting range] 0 to 255 [Unit] 0.01 MPa 15056 EPCAGS EPCAGS Type of piercing assist gas Set a type of assist gas to be used for piercing. [Setting range] 0 to 7 15057 ERTLGH ERTLGH Return distance Set a return distance from the top of a corner to the next block.
  • Page 402D. PARAMETERS APPENDIX B–70115EN/03 D.5 PARAMETERS FOR PIERCING CONDITIONS 15070 LPWRP 0227 LPWRP LPWRP selection of laser power for piercing (Setting data) [Setting range] 0 to 7000 [Unit] WATT [How to set] This parameter can be set in laser setting screen or processing program. 15071 LHZP 0228 LHZ
  • Page 403B–70115EN/03 APPENDIX D. PARAMETERS D.6 PARAMETERS FOR HIGH–SPEED PIERCING CONDITIONS 15080 HPPWR HPPWR High–speed piercing power [Setting range] 0 to 7000 [Unit] Watt 15081 HPFRQ HPFRQ Initial high–speed piercing frequency [Setting range] 5 to 2000 [Unit] Hz 15082 STFRQ STFRQ Incremental high–speed
  • Page 404D. PARAMETERS APPENDIX B–70115EN/03 15086 STPNM STPNM Number of high–speed piercing steps [Setting range] 0 to 32767 15087 HPTIM HPTIM High–speed piercing end time [Setting range] 0 to 9999999 [Unit] msec 404
  • Page 405B–70115EN/03 APPENDIX D. PARAMETERS D.7 PARAMETERS FOR POWER CONTROL #7 #6 #5 #4 #3 #2 #1 #0 15088 IPC IPC For power control mode specification (models A and B): 0 : The format for specifying S and F in the same block is used. 1 : The format for specifying G63 or entering the external signal (G224#1
  • Page 406D. PARAMETERS APPENDIX B–70115EN/03 15093 LDTY0 0244 LDTY0 LDTY0 Power control constant When power control has been enabled with bit 0 of PRM No. 15000 [200], power control is performed according to the value of LDTY0. LDTY0 is used to specify the duty ratio when the feedrate is 0, thus enabling mod
  • Page 407B–70115EN/03 APPENDIX D. PARAMETERS #7 #6 #5 #4 #3 #2 #1 #0 15096 PCD PCF PCP PCP 0 : Does not exercise feedrate–based output control in newly specified power control. 1 : Exercises feedrate–based output control in newly specified power control. PCF 0 : Does not exercise feedrate–based frequency con
  • Page 408D. PARAMETERS APPENDIX B–70115EN/03 D.8 PARAMETERS FOR ASSIST GAS PRESSURE AND TIME SETTING 15100 LAGASL 0214 LAGASL LAGASL Selection of assist gas (Setting data) [Setting range] 0 to 7 [How to set] This parameter can be set either in laser setting screen or in material processing program. 15101 LAF
  • Page 409B–70115EN/03 APPENDIX D. PARAMETERS 15114 LAGPR1 0215 LAGPR1 15115 LAGPR2 0216 LAGPR2 15116 LAGPR3 0217 LAGPR3 LAGPR1, 2, 3 Pre–flow pressure 1, 2, 3 (Setting data) [Setting range] 0 to 255 [Unit] 0.01 MPa [How to set] This parameter can be set in laser setting screen. 15120 LAGEX1 0218 LAGEX1 15121
  • Page 410D. PARAMETERS APPENDIX B–70115EN/03 15132 AGPST 3990 AGPST AGPST Maximum assist gas pressure Set an assist gas pressure (MPa) at which 12.5 V is output. [Setting range] 0 to 255 [Unit] MPa [Standard setting] 255 15135 AGTIM AGTIM Assist gas pressure set time Set a desired assist gas pressure set tim
  • Page 411B–70115EN/03 APPENDIX D. PARAMETERS D.9 PARAMETERS FOR LASER MAINTENANCE TIMING INDICATION FUNCTIONS 15150 LTTIME 0187 LTTIME LTTIME Laser RUN ON time A cumulative RUN ON time is automatically set. [Setting range] 0 to 99999999 [Unit] 0.1 hour Standard setting: Automatically set 15151 VPTIME VPTIME
  • Page 412D. PARAMETERS APPENDIX B–70115EN/03 D.10 PARAMETERS FOR THE OSCILLATOR 15200 LPCMD1 LPCMD1 Power used for power calibration factor determination when half of the discharge tubes are used Set a power to find the power calibration factor when half of the discharge tubes are used. [Setting range] 0 to
  • Page 413B–70115EN/03 APPENDIX D. PARAMETERS 0232 LPCMD3 LPCMD3 Power command for power calibration in mode of 8 discharge tubes. This is power command for power calibration in mode of 8 discharge tubes. Duty is 100%. [Setting range] 0 to 32767 [Unit] WATT [Standard setting] Refer to the parameter data sheet
  • Page 414D. PARAMETERS APPENDIX B–70115EN/03 15207 PCLMT 3986 PCLMT PCLMT Maximum specifiable power If a specified laser power after power compensation and power feedback processing exceeds the setting in this parameter, the laser power is clamped to the setting. [Setting range] 0 to 32767 [Unit] WATT [Stand
  • Page 415B–70115EN/03 APPENDIX D. PARAMETERS [Unit] WATT [Standard setting] Refer to the parameter data sheet delivered with the machine. 15212 PPCLMT PPCLMT Maximum specifiable power when the duty ratio is not clamped If PRM No. 15213 does not clamp the duty ratio to 50%, and a specified power after power c
  • Page 416D. PARAMETERS APPENDIX B–70115EN/03 D.11 PARAMETERS FOR DISCHARGE 15220 LVICMD 0247 LVICMD LVICMD Maximum bias command at discharge start Discharge current command is given when discharge start signal (HVON) is commanded in discharge preparation completion (LRDY) state to start discharge. This comma
  • Page 417B–70115EN/03 APPENDIX D. PARAMETERS 15223 LVCMD 0250 LVCMD LVCMD Bias command in oscillator preparation completion state After the start of discharge is confirmed, the bias voltage of discharge current command is replaced by this parameter. This replacement is performed during a rise in the gas pres
  • Page 418D. PARAMETERS APPENDIX B–70115EN/03 D.12 PARAMETERS FOR GAS CONTROL (1) 15240 LEXPS 0235 LEXPS LEXPS Negative pressure in exhaust completion This is the ultimate vacuu when gas flow system is evacuated in laser [Starting range] 0 to 32767 [Unit] 13 Pa [Standard setting] Refer to the parameter data s
  • Page 419B–70115EN/03 APPENDIX D. PARAMETERS 0236 LPPS LPPS Intra–tube pressure during oscillation This is intra–tube gas pressure in laser preparation completion (LSTR) state. [Unit] 13 Pa [Standard setting] Refer to the parameter data sheet delivered with the machine. 15244 LCCGN 0264 LCCGN LCCGN Gas press
  • Page 420D. PARAMETERS APPENDIX B–70115EN/03 15248 GPNRAV 4399 GPNRAV GPNRAV Allowable gas pressure insufficiency The insufficient gas pressure alarm is issued when the gas pressure in the discharge tube does not reach [(specified tube pressure for oscillation) – (this allowable value)]. [Setting range] 0 to
  • Page 421B–70115EN/03 APPENDIX D. PARAMETERS 15257 VIBCNT VIBCNT Number of abnormal vibrations detected If the number of abnormal vibrations detected exceeds the value specified in this parameter, an abnormal vibration alarm is issued. [Setting range] 0 to 32767 [Unit] Number [Standard setting] 30 15258 LGPT
  • Page 422D. PARAMETERS APPENDIX B–70115EN/03 D.13 PARAMETERS FOR HIGHLY REFLECTIVE MATERIAL ALARMS 15265 PWRUP 3982 PWRUP PWRUP Maximum allowable power increase If the actual power exceeds the specified power by the value specified in this parameter, a beam reflection error is reported. [Setting range] 0 to
  • Page 423B–70115EN/03 APPENDIX D. PARAMETERS D.14 PARAMETERS FOR LASER POWER/VOLTAGE DROP 15270 NRMLTV 0199 NRMLTV NRMLTV Discharge tube voltage in normal operation In this parameter, the voltage to be applied to the discharge tube in normal base discharge is set. The value set in this parameter serves as th
  • Page 424D. PARAMETERS APPENDIX B–70115EN/03 15276 GCHTM 3992 GCHTM GCHTM Laser gas replacement time Set a time for laser gas replacement in laser start operation. [Setting range] 0 to 32767 [Unit] sec [Standard setting] Refer to the parameter data sheet delivered with the machine. 424
  • Page 425B–70115EN/03 APPENDIX D. PARAMETERS D.15 PARAMETERS FOR POWER TABLE SETTING 15280 LPCPW1 15281 LPCPW2 LPCPW1 Table interval when half of the discharge tubes are used Set a power command setting interval. [Setting range] 30 to 1200 [Standard setting] Refer to the parameter data sheet delivered with t
  • Page 426D. PARAMETERS APPENDIX B–70115EN/03 15295 LPCP15 0282 LPCP25 15296 LPCP16 0283 LPCP26 15297 LPCP17 0284 LPCP27 15298 LPCP18 0285 LPCP28 LPCP20–28 Power command in mode of 4 discharge tubes Power command is increased by increment of PRM No. 15280[266] for mode of 4 discharge tubes starting from 0. [S
  • Page 427B–70115EN/03 APPENDIX D. PARAMETERS D.16 AUTOMATIC AGING FUNCTION 15320 LPCD LPCD2C Command power for power calibration coefficient calculation (valid when EGE = 1) If the automatic aging function is enabled, a power calibration coefficient is calculated after aging ends. [Setting range] 0 to 7000 [
  • Page 428D. PARAMETERS APPENDIX B–70115EN/03 15324 LPSC LPSC Intra–tube pressure setting at oscillation time for power calibration coefficient calculation (50 Hz) (valid when EGE = 1) For an oscillator with an inverter mounted, the same value as parameter No. 15325 is to be set. This parameter specifies a va
  • Page 429B–70115EN/03 APPENDIX D. PARAMETERS 15328 LDCD2E LDCD2E Pulse duty cycle command for aging (valid when EGE = 1) This parameter specifies a duty cycle to be used when aging is performed with the automatic aging function. [Setting range] 0 to 100 [Unit] % [Standard setting] 50 15329 PLCTME PLCTME Powe
  • Page 430D. PARAMETERS APPENDIX B–70115EN/03 15332 LFCMD2 LFCMD2 Oscillation frequency command value for power calibration [Setting range] 5 to 2000 [Unit] Hz [Standard setting] 100 15333 LDCMD2 LDCMD2 Pulse duty cycle command during power calibration and aging [Setting range] 0 to 100 [Unit] % [Standard set
  • Page 431B–70115EN/03 APPENDIX D. PARAMETERS 15338 LOFTIMH LOFTIMH Aging time data 4 (valid when EGE = 1) When the automatic aging function is enabled, the hour when the oscillator was stopped previously is recorded. [Setting range] 0 to 24 (Automatically set by the CNC) 431
  • Page 432D. PARAMETERS APPENDIX B–70115EN/03 D.17 PARAMETERS FOR TRACING (DETECTION) 15500 KE 0252 KE KE Detector gain factor This parameter sets a gain factor for the displacement detector in Z–axis tracing control. [Setting range] 2048 (0.5 212) to 6144 (1.5 212) [Standard setting] 4096 NOTE This parameter
  • Page 433B–70115EN/03 APPENDIX D. PARAMETERS 15504 EMUL 0295 EMUL EMUL Displacement multiplication factor Set a displacement multiplication factor to match a greater value to be detected in tracing control. (Usually, 1 is set.) [Setting] 1 or 5 [Standard setting] 1 Set value Maximum displacement Resolution (
  • Page 434D. PARAMETERS APPENDIX B–70115EN/03 D.18 PARAMETERS FOR TRACING (DISPLAY) #7 #6 #5 #4 #3 #2 #1 #0 15510 TRA TRA 1 : Uses an absolute coordinate system to display the current position on the tracer setting screen. 0 : Uses a relative coordinate system to display the current position on the tracer set
  • Page 435B–70115EN/03 APPENDIX D. PARAMETERS D.19 PARAMETERS FOR TRACING (INTEGRAL PROCESSING) 15510 INTGT 0255 INTGT INTGT Integral time constant Set an integral time constant for integral processing of deviations in Z–axis tracing control. [Setting range] 0 to 32767 [Unit] msec [Standard setting] 0 15511 Z
  • Page 436D. PARAMETERS APPENDIX B–70115EN/03 D.20 PARAMETERS FOR TRACING (PHASE COMPENSATION) 15520 ISOUT 0257 ISOUT ISOUT Phase compensation time constant Set a time constant for displacement phase compensation in Z–axis tracing control. [Setting range] 0 to 32767 [Unit] msec [Standard setting] 0 (Values of
  • Page 437B–70115EN/03 APPENDIX D. PARAMETERS D.21 PARAMETERS FOR TRACING (DISPLACEMENT) 15530 NMDEF 0224 NMDEF NMDEF Reference displacement Set a reference distance to be controlled from the quill top to a workpiece to be controlled in Z–axis tracing control. [Setting range] PRM No. 15531 [260] to PRM No. 15
  • Page 438D. PARAMETERS APPENDIX B–70115EN/03 [Setting range] 0 to 32767 [Unit] 0.001 mm [Standard setting] 1200 15537 EOVRS 3987 EOVRS EOVRS Detection displacement for issuing the tracing range exceeded alarm In Z–axis tracing control, when the absolute value, DE, of a tracing deviation (detection displaceme
  • Page 439B–70115EN/03 APPENDIX D. PARAMETERS D.22 PARAMETERS FOR TRACING (FEEDRATE COMMAND) 15540 ZTCGM 0296 ZTCGM 15541 WTCGM 3984 WTCGM 15542 XTCGM 15543 YTCGM ZTCGM Conversion factor for feedrate control voltage in Z–axis tracing control WTCGM Conversion factor used to convert a voltage for feedrate speci
  • Page 440D. PARAMETERS APPENDIX B–70115EN/03 D.23 PARAMETERS FOR TRACING (APPROACH) 15550 APRCH 0251 APRCH APRCH Approach completion detection range Set a range of displacements assumed to represent approach completion in Z–axis tracing control. Approach completion is assumed when the state where displacemen
  • Page 441B–70115EN/03 APPENDIX D. PARAMETERS D.24 PARAMETERS FOR CONSTANT OPTICAL PATH LENGTH CONTROL #7 #6 #5 #4 #3 #2 #1 #0 15700 8 7 6 5 4 Z Y X X – 8 Set axes required to calculate a move command for a mirror movement axis. 1 : Used for move command calculation 0 : Not used for move command calculation N
  • Page 442D. PARAMETERS APPENDIX B–70115EN/03 15704 MIRCOM MIRCOM Mirror block axis reference position compensation When correcting the mirror block axis position to obtain an optimum propagation distance, set the distance from the origin in this parameter. [Setting range] "32767 [Unit] mm [Standard setting]
  • Page 443B–70115EN/03 APPENDIX D. PARAMETERS D.25 LASER GAS MIXER FUNCTION 15710 BMBCTM 4390 BMBCTM BMBCTM External piping exhaust time [Setting range] 0 to 32767 [Unit] sec [Standard setting] 10 (2/m pipe length) 15711 GMMWT 4411 GMMWT GMMWT Gas mixture wait time [Setting range] 0 to 32767 [Unit] min [Stand
  • Page 444D. PARAMETERS APPENDIX B–70115EN/03 15715 VCCKPR VCCKPR Vacuum criteria gas pressure [Setting range] 0 to 32767 [Unit] 13 Pa [Standard setting] 100 15716 TVTMR 4391 TVTMR TVTMR Evacuation wait time [Setting range] 0 to 32767 [Unit] min [Standard setting] Refer to the parameter data sheet delivered w
  • Page 445B–70115EN/03 APPENDIX D. PARAMETERS D.26 PARAMETERS FOR GAS CONTROL (2) #7 #6 #5 #4 #3 #2 #1 #0 15800 TPC TPC 0 : Disables the turbo blower constant power drive control function. 1 : Enables the turbo blower constant power drive control function. 15801 LPPSM LPPSM Maximum intra–tube pressure when th
  • Page 446D. PARAMETERS APPENDIX B–70115EN/03 15804 TPW TPW Maximum open time of the exhaust valve for intra–tube pressure control at oscillation time [Unit] msec [Setting range] 0 to 3000 446
  • Page 447E. CONTROL SEQUENCES B–70115EN/03 APPENDIX IN LASER OSCILLATOR E CONTROL SEQUENCES IN LASER OSCILLATOR 447
  • Page 448E. CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B–70115EN/03 E.1 OUTLINE OF LASER OSCILLATION SEQ 0 SEQUENCES PURGE =0 LRDY =0 PTLP =0 LSTR =0 POWER ON POWER OFF SEQ 10 PURGE =1 LRDY =0 INITIAL PTLP =0 LSTR =0 SEQ 11 RUN ON (WAIT = 1) SEQ 19 RUN OFF (WAIT = 1) SEQ 20 PURGE =0 READY OF DISCHARGING
  • Page 449E. CONTROL SEQUENCES B–70115EN/03 APPENDIX IN LASER OSCILLATOR [SEQ 0] POWER OFF state This is the state prior to power on where all the signals are in off state. [SEQ 10] INITIAL state After power is turned on, laser comes into PURGE=1 state. This signal is on when atmospheric pressure sensor monit
  • Page 450E. CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B–70115EN/03 E.2 Intra–tube gas pressure control is performed in the following steps as shown in the figure. INTRA–TUBE GAS PRESSURE CONTROL SEQUENCES GAS PRESSURE : COMMAND : REAL PRM15249 PRM15242 15243 [236] Pressure value "20 (="266 Pa) PRM15241
  • Page 451E. CONTROL SEQUENCES B–70115EN/03 APPENDIX IN LASER OSCILLATOR [SQ 10] This is the state after power is turned on in which intra–tube gas pressure equals atmospheric pressure. [SQ16, 17, 18] Setting the laser start switch (RUN) to ON starts evacuation, which continues until the pressure designated b
  • Page 452E. CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B–70115EN/03 [SQ49, 13, 12] In the SQ20 state, setting the laser start switch (RUN key) to OFF terminates gas pressure control, after which the turbo blower is shut down, taking about 70 seconds to stop. If evacuation after RUN OFF has been enabled,
  • Page 453E. CONTROL SEQUENCES B–70115EN/03 APPENDIX IN LASER OSCILLATOR E.3 The control of tube voltage is done simultaneously with that of gas pressure as shown in Fig. E.3 in the following sequences. TUBE VOLTAGE CONTROL SEQUENCES GAS PRESSURE PRM15242, 15243 (PRM236) PRM15241 (PRM237) SQ20 SQ26 SQ27 SQ28
  • Page 454E. CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B–70115EN/03 [SQ 291] When HV is turned on, high voltage is applied to discharge tubes and voltage control begins. Here command is increased in ramp mode up to the value of PRM 15220 [247] (maximum bias command at discharge start). The time required
  • Page 455E. CONTROL SEQUENCES B–70115EN/03 APPENDIX IN LASER OSCILLATOR [SQ 294] When normal base discharge is confirmed and PRM15000 bit 4 [200 bit 4] is 1 (power calibration is done), this sequence begins to obtain power calibration coefficient. Power calibration is to calibrate so that real and command po
  • Page 456E. CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B–70115EN/03 E.4 OSCILLATION Power ON sequence SEQUENCES FLOW CHART PURGE = ON OFI = OFF NO RUN = ON YES Alarm 1 monitor treatment start PCR = OFF OFI = ON PURGE = OFF WAIT = ON CLON = ON Wait for 3 seconds RPA = ON CAMCON = FULL OPEN Chiller monitor
  • Page 457E. CONTROL SEQUENCES B–70115EN/03 APPENDIX IN LASER OSCILLATOR TIMER A RESET This timer begins counting after the start of evacuation. 1 VEN = ON PCL = OFF Wait for 5 seconds GRDY = ON GRDY = OFF CAMCON = FULL CLOSE NO Timer count Intra–tube pressure PRM15259 [600 se
  • Page 458E. CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B–70115EN/03 VEN=OFF Exhaust valve is closed. RBA=ON Start of Roots blower. 2 Gas pressure control start 200 VAC to DC power supply unit PRM15240 [235] → PRM15241 [237] Wait for 45 seconds PRM15241 [237] +20 > Intra–tube pressure NO > PRM15241 [237]
  • Page 459E. CONTROL SEQUENCES B–70115EN/03 APPENDIX IN LASER OSCILLATOR HV=ON When HV is turned on, laser can proceed to the next sequence. HV ON can either be done in manual mode or automatic mode using PMC. LRDY=OFF When HV is turned on, LRDY becomes off. PSS1–8=SET This is to select power units and usuall
  • Page 460E. CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B–70115EN/03 discharge is confirmed, BIAS COMMAND is changed automatically from PRM15220[247] to PRM15223 [250] (BIAS COMMAND). If all the tubes are confirmed normal discharge, intra–tube pressure is changed from PRM15241 [237] to PRM15242, 15243 [23
  • Page 461E. CONTROL SEQUENCES B–70115EN/03 APPENDIX IN LASER OSCILLATOR The result is compared with PRM15203 [240] (power calibration limit). When PRM15204 [241] exceeds PRM15203 [240], the former is clamped by the latter. LSTR=ON Oscillation preparation completion signal is on. Here oscillation in both manu
  • Page 462F. REFIXING AND REPLACING GAS TUBE APPENDIX B–70115EN/03 F REFIXING AND REPLACING GAS TUBE Replacing both of polyethylene and copper tubes is the same. Take care only for the combination between tube materials and ferrule materials. Polyethylene tube : nylon ferrule (back, front) (A98L–0004–0348/2–N
  • Page 463F. REFIXING AND REPLACING B–70115EN/03 APPENDIX GAS TUBE F.1 1 Loosen tube fixing nut. Make sure to hold the fitting base with wrench. REFIXING TUBE 2 Remove tube. Removed tube is accompanied by ferrule as shown in Fig. F.1. Make sure that neither of tube nor ferrule is contaminated with dust. When
  • Page 464F. REFIXING AND REPLACING GAS TUBE APPENDIX B–70115EN/03 F.2 1 Cut the tube perpendicular to its length, then mount new ferrules on the tube. REPLACING TUBE Referring to Fig. F.1, mount fixing nut, back ferrule, and front ferrule onto tube. Here make sure not to introduce dust into tube and ferrule.
  • Page 465G. REFIXING AND REPLACING B–70115EN/03 APPENDIX WATER TUBE G REFIXING AND REPLACING WATER TUBE For brass and stainless steel tubes, be careful to make proper selection of fitting material and structure. Here make sure not to wet inside of apparatus in draining and removing tube. 465
  • Page 466G. REFIXING AND REPLACING WATER TUBE APPENDIX B–70115EN/03 G.1 1) Loosen tube fixing nut. Make sure to hold the fitting base with wrench. REFIXING TUBE TO 2) Remove tube. BRASS FITTING a) In case of brass fitting: Removed tube is accompanied as shown in Fig. G.1 by plastic sleeve. Nut Tube Plastic s
  • Page 467G. REFIXING AND REPLACING B–70115EN/03 APPENDIX WATER TUBE G.2 1) (a) In case of brass fitting Mount a new sleeve on the tube. REPLACING TUBE (b) In case of stainless steel fitting If a sleeve is necessary, mount a new sleeve on the tube. If no sleeve is necessary, insert the tube as is. In mounting
  • Page 468H. GLOSSARY APPENDIX B–70115EN/03 H GLOSSARY Name Meaning Access panel That protective component of a housing or enclosure which, when removed or shifted, can cause exposure to laser radiation AEL Accessible Maximum accessible emission level set up for each emission level class of laser products Ali
  • Page 469B–70115EN/03 APPENDIX H. GLOSSARY Name Meaning Feedback Corrective action in which a quantity to be controlled is compared with a target value by feeding part of an output signal to the input through a specially created closed loop so that the quantity to be controlled matches the target value Laser
  • Page 470H. GLOSSARY APPENDIX B–70115EN/03 Name Meaning Protective housing Laser product housing or its part designed to protect humans from exposure to a laser beam exceeding an accessible emission level or strong collateral radiation Pulse duration Time interval between the points at which an instan- taneo
  • Page 471B–70115EN/03 Index ƠAơ Connection of cooling water pipes, 108 Control sequences in laser oscillator, 441 Adjusting the beam center of the laser diode beam superimposed on the CO2 laser beam, 354 Cooling water, 87 Adjusting the diameter of the laser diode beam, 354 Cooling water piping, 194 Adjusting
  • Page 472INDEX B–70115EN/03 ƠIơ Obtaining a maximum power, 345 Optical axis adjustment, 341 Indication of state by means of self diagnostic function, 171 Organization of the manual, 2 Input unit, 211, 273 Oscillation sequences flow chart, 450 Installation, 66 Oscillator connections, 87, 186 Installation proc
  • Page 473B–70115EN/03 INDEX Refixing tube to brass fitting, 460 Responding to alarm messages on the screen, 136 Related manuals, 4 Removing cooling water, 77 Replacement procedures, 272 ƠSơ Replacing a discharge tube, 299 Safety enclosure (at your work station), 20 Replacing a fan–assisted radiator, 300 Sett
  • Page 474
  • Page 475Revision Record FANUCĄLASER C series MAINTENANCE MANUAL (B–70115EN) D Additional descriptions of C2000C, C3000D, C600B and 03 Apr., 2000 C4000A. D Addition of C3000C. 02 Jul., 1996 D Correction of errors 01 May, 1995 Edition Date Contents Edition Date Contents
  • Page 476
  • Page 477EUROPEAN HEADQUARTERS – BELGIUM / NETHERLANDS GRAND-DUCHÉ DE LUXEMBOURG GE Fanuc Automation Europe S.A. GE Fanuc Automation Europe S.A. - Netherlands Branch - Zone Industrielle Postbus 7230 - NL-4800 GE Breda L-6468 Echternach Minervum 1603A - NL-4817 ZL Breda ( (+352) 727979 - 1 ( (+31) 76-5783 201
  • Page 478• No part of this manual may be reproduced in any form. • All specifications and designs are subject to change without prior notice. The export of this product is subject to the authorization of the government of the country from where the product is exported. In this manual we have tried as much as
  • Page 479TECHNICAL REPORT NO.TML 01/005E Date. JUN. 11.2001 General Manager of Laser Laboratory Correction of the manual of FANUC LASER C series 1. Communicate this report to: ○ Your information ○ GE Fanuc-N, GE Fanuc-E FANUC Robotics CINCINNATI MILACRON ○ Machine tool builder Sales agency End user 2. Summar
  • Page 480Corrections of the periodic maintenance 1.Type of applied technical documents Name FANUC LASER C series OPERATOR'S MANUAL Spec. No. / Ver. B-70114EN/04 2.Summary of change Group Name / Outline New, Add Applicable Correct, Del Date Basic Function Optional Function Unit Maintenance Parts Notice Correc
  • Page 481In FANUC LASER C series OPERATOR’S MANUAL B-70114EN/04, interval of turbo blower oil change is corrected on page 121,122. Table 5.2(a) Periodic maintenance items and periods (Page 121) Interval of maintenance (Operation hour) C2000B C3000C C1500B C2000C C3000D True : 1000h or inferior turbo blower o
  • Page 482Corrections of the periodic maintenance 1.Type of applied technical documents Name FANUC LASER C series MAINTENANCE MANUAL Spec. No. / Ver. B-70115EN/03 2.Summary of change Group Name / Outline New, Add Applicable Correct, Del Date Basic Function Optional Function Unit Maintenance Parts Notice Corre
  • Page 483In FANUC LASER C series MAINTENANCE MANUAL B-70115EN/03, the interval of turbo blower oil change is corrected on page 112,113. Table 5.2(a) Periodic maintenance items and periods (Page 112) Interval of maintenance (Operation hour) C2000B C3000C C1500B C2000C C3000D True : 1000h or inferior turbo blo