
B-65150E/04 4. SERVO FUNCTION DETAILS
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4.16 USAGE OF THE SERVO SOFTWARE FOR SUPER-
PRECISION MACHINING
(1) Overview
For servo systems used for super-precision machines, a special setting
may be required in addition to the conventional settings of 1 µm and 0.1
µm as detection unit.
In the cases described below, the super-precision function of the Series
9081 digital servo software must be used.
1 When the position detection unit of the laser or
scale is 0.01 µm or 0.001 µm, and the number of
position pulses per motor revolution is 130,000 or
more
In this case, a servo parameter causes an overflow in the digital servo
system, so that the Series 9081 must be used. For an explanation of
how to make this setting, see (3) in this section.
Example)
When the amount of travel per motor revolution is 4 mm, and
0.01-µm position detection is performed (when the number of
position pulses per motor revolution is 400,000)
2 When an amplifier with a smaller capacity than a
regular amplifier is used to place emphasis on
smooth feed rather than maximum motor torque
In this case, the current loop and velocity loop parameters must be
modified. With the Series 9081, the required conversions can be made
only by setting a conversion coefficient parameter.
For an explanation of how to make this setting, see (4) in this section.
Example)
When the α3/3000 (usually driven by a 40-A amplifier) is driven
using the 12-A amplifier designed for the α2/2000
3 When a reduced voltage is applied to the amplifier
to place emphasis on smooth feed rather than
maximum motor speed