
4.INSTALLATION B-70255EN/01
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(3) Check the outsides of units installed in the oscillator as follows:
Check items
1 Check whether any printed circuit boards are loose or removed.
2 Check whether any cables are damaged (such as damaged sheathing).
3 Check whether any connectors are loose or detached.
4 Check that the discharge tubes are neither cracked nor damaged.
5 Check that the turbo blowers and other units are neither loose nor
missing.
6 Check that the power supply units and matching boxes are neither
loose nor missing.
7 Check that the input unit is neither loose nor missing.
8 Check that the connection to the electrode of each discharge tube is not
loose.
9 Check whether any joint part of the water piping and gas piping is loose.
10 Check all screw terminals in the units.
11 Check the oil level in the turbo blowers, and check for oil contamination.
(See Section 5.3 for details.)
(4) Connect the power and signal lines to the oscillator. (See
Subsection 4.4.3 for details.)
Check items
1 Signal cable between the NC and oscillator (optical fiber), 24V DC
2 Oscillator power cable
3 Grounding cable (class-1)
4 Exhaust pump power cable (See Subsection 4.4.4 for details.)
Connect the power cable of the exhaust pump (to the oscillator
and pump).
(5) Check the communication setting on the interface PCB. (See
Subsection 6.5.5 for details.)
When a metal cable is used : LINK1 (JD1)
When an optical fiber cable is used : LINK1 (COP)
(6) Laser gas and cooling water pipes. (See Subsections 4.4.1 and
4.4.2 for details.)
Check items
1 Laser gas pipe type
Recommended gas pipe
Nylon tube AS1, manufactured by Junko Co. Ltd.
Polyprotube, manufactured by Imperial Co. Ltd.
Stainless bright anneal pipe
2 There must be no gas leakage in the external piping between the gas
cylinder and oscillator.
3 Laser gas composition and purity (Check whether the specifications are
satisfied.)
4 Quality of cooling water (Tap water passed through an ion exchanger is
recommended.)
5 Flow of cooling water (IN, OUT)
6 Connection of the gas feeder piping of the exhaust pump
Connect the gas feeder piping of the exhaust pump (to the
oscillator and pump).